硅基片上波长与偏振混合复用传输系统机理的表征、模拟与实验研究

Based on the slot or hybrid plasmonic silicon wires, two types of microring-resonator-based polarization multiplexer/demultiplexers are proposed; Based on the LiNbO3/polymer vertical slot or silicon/LiNbO3 photonic wires, two types of silicon optical modulators, operating at TE and TM modes, respectively, are proposed. By using these fundamental elements, a silicon-based wavelength/polarization division multiplexing on-chip is proposed, where the proposed modulators are integrated at the corresponding input channels. By further cascading these microring resonators reasonably, a high efficiency on-chip hybrid multiplexing transmission system with multiple wavelengths and polarizations can be achieved. The present hybrid multiplexing on-chip has the advantages of ease of expansion, removal of the cross-modulation and dependence on the comb sources, and ease of automated thermal stabilization. Several mathematical models with high accuracy and efficiency are proposed and constructed for analyzing the modal and transmission characteristics of nano-scaled silicon-based integrated photonic devices and the corresponding CAD software package is developed. The mode/transmission characteristics of the slotted and hybrid plasmonic microring resonators are investigated in detail and their variation with the materials and waveguide structures including dimensions are revealed. Moreover, the interaction mechanism of the optical and RF signals together with their modal and transmission performance in two types of microring modulators is also studied in detail. From above-mentioned work, using standard CMOS process, the device samples are fabricated and tested.

基于硅基槽式及混合等离子体纳米线，.提出两种微环谐振腔型偏振复用/解复用器结构；基于硅基铌酸锂/聚合物垂直槽式及硅/铌酸锂纳米线，提出两种分别用以调制TE及TM模光信号的光调制器；以此为基础，提出一种硅基片上波分/偏振混合复用传输系统，其中每输入通道分别集成TE或TM模硅光调制器，通过级联可实现多波长、多偏振态光信号的高效混合复用传输。本方案易于升级扩容，可消除交叉调制，摆脱梳状光源依赖，自动热稳定控制简单等优点。提出高精度、高效率分析纳米尺度硅基光子器件模式与传输特性的数理模型，深入研究槽式与混合等离子体微环谐振腔的模式/传输特性，优化复用器/解复用器结构，进而获得最优的偏振复用效果；深入分析两种微环调制器在光频/与RF波段的模式/传输特性及互作用机理，优化调制器结构；综合分析系统整体性能，并给出关键设计参数制作容差；在理论分析基础上，依托标准CMOS工艺线，试制片上系统样品并测试其性。

提出一种新颖的硅基片上波长/偏振混合复用传输系统，其中偏振复用/解复用部分由槽式或混合等离子体微环谐振腔构成，并进一步将谐振波长与波分复用的通道波长进行匹配；在每个输入通道处分别集成硅基微环调制器，经调制后的TM和TE模分别通过槽式或混合等离子体微环谐振腔复用进总线波导以实现多波长、多偏振态光信号的高效混合复用传输。提出了全矢量有限云法、全矢量Denman–Beavers迭代法、全矢量多域伪谱双向束传播法、全矢量弯曲波导求解器，结合已构建的三维时域有限差分法、全矢量有限差分法，研制了分析微纳尺度硅基常规波导、硅基等离子体波导、硅基弯曲波导色散特性及其光子器件光波传输特性的CAD软件模块。由此，深入分析了用于偏振复用的硅基槽式及混合等离子体微环谐振腔的偏振特性、模式特性及波长选择特性，优化出了各自材料结构、波导结构和尺寸；深入分析了硅基铌酸锂/聚合物垂直槽式微环调制器和硅/铌酸锂微环调制器在光频/RF波段的模式特性与传输特性，建立了光/RF互作用机理模型，优化了调制器的材料结构、波到结构及电极结构；在此基础上，单片集成硅基槽式（混合等离子体）微环谐振腔及两种微环调制器，构成片上集成型波分/偏振混合复用传输系统，深入研究该系统的光传输特性，分析了其通道串扰、通道间隔、额外损耗等与波导参数的关系；依托标准的CMOS工艺线，试制器件样品并测试特性。此外，依托本课题，以硅基亚波长光栅为基础，课题组开展了紧凑式硅基偏振旋转器/分束器、起偏器、功分器、中红外/近红外波长复用/解复用器、化生传感器的研究工作，研究结果已公开发表。依托本课题，培养了博士研究生3名、硕士研究生3名，6名学生均已顺利毕业，获得了相应的工学博士/硕士学位；在国际/内核心期刊及国际学术会议发表论文31篇，其中期刊论文27篇，均被SCI收录，国际会议论文4篇（特邀口头报告3篇），均被EI与ISTP双收录；申请国家发明专利21件，其中授权13件；出国参加国际学术会议4次，共计7人次。