光电特征标识用大功率窄带输出变频调制MEMS红外光源及其阵列化基础研究

This project is aimed at the requirements of infrared photoelectric characteristics identification technology development for applications in the field of wireless communications, military target identification friend or foe of the near-earth space, search and rescue personnel in special operating environment. The integrated manufacturing Methods of the modulation MEMS infrared sources and array realization with high power and narrow-band outputproperties are investigated.The MEMS infrared source devices with high electro-optical conversion efficiency and high modulation frequency are manufactued by SOI based polysilicon as radiation suspended structure combined with thin films doping modification technology. The dependent relations between the radiation characteristics (the emitted spectral intensity distribution, the dispersion angle, the output power), modulation characteristics and device structure characteristics (suspended structure, material composition gradient) of the IR sources are revealed systematically. The radiation equivalent models of the single light source and its array are established. The light radiation perspective adjustment methods based on the collimated radiation and three-dimensional array structures are researched. The key technique of multidimensional coded modulation of MEMS infrared source in three-dimensional array and frequency change is resovled in this project. The amount of information available and the safety reliability for photoelectric characteristics identification technology are enhanced effectively. It would be provided a basis theoretical support for new type of infrared photoelectric characteristics identification technology applications.

项目针对红外光电特征标识技术在近地空间无线通信、军事目标敌我识别、特殊作业环境人员搜救等领域的应用要求，开展大功率窄带输出的变频调制MEMS红外光源集成制造及其阵列化基础研究，提出SOI基多晶硅辐射体悬浮结构设计与薄膜掺杂改性技术相结合的高电光转化效率变频调制MEMS红外光源器件实现方法，系统揭示MEMS红外光源辐射特性（出射光谱强度分布、弥散角度、输出功率等）、变频调制特性与器件结构设计（悬浮结构、材料成分梯度等）之间的依赖关系，建立单一光源和阵列光源的辐射等效模型，研究基于准直辐射和三维阵列结构设计的光源辐射视角调节方法，实现MEMS红外光源在三维阵列空间上和频率变化时间上的多维编码调制关键技术，有效提升光电特征标识的可用信息量和安全可靠性，为新型红外光电特征标识技术应用提供核心光源器件和基础理论支持。

MEMS红外光源器件在近地面空间无线通信、战场目标敌我识别、复杂环境抢险救灾、工矿业生产安全和红外质谱分析等领域有着广泛的应用。本项目完成了大功率窄带输出变频调制MEMS红外光源器件的设计与制造、MEMS红外光源辐射特性与变频调制特性研究、MEMS红外光源阵列化及其时间-空间多维编码调制方法研究、变频调制MEMS红外光源阵列光电特征标识特性及原理验证。经系统性测试分析，器件具有3～5 μm中红外波段窄带稳定输出的辐射特性，可实现1～50 Hz变频深度调制，以5.8 V电压驱动时光源输出功率约65.7 mW，电光转化效率达9.76%，有效收敛控制了辐射功率角度，经理论分析可实现光源辐射光线的全准直出射;开发了基于VB编程的光电标识系统计算机辅助设计软件该光源单元的理论辐射探测距离可达7924m，与理论计算结果拟合度达99.7%;供电驱动电压精度达1.8%，驱动效率80.1，可完全满足光源单元673mW驱动功率的带载能力;将光源以5×5平面点结构阵列化，提出了点阵图形与频率调制相结合的空间一时间二维复合动态编码调制方法，编码信息容量达800Mb，理论无误码状态传输速率达1.25kb/s;采用FPGA控制该光源阵列光电标识系统的点阵编码图形结构与图形动态切换频率，实现红外光电信号的高精度可靠调制控制;采用红外热像仪观瞄动态红外点阵图形，获得了较好的编码信息识别效果。为新型红外光电特征标识技术应用提供技术和理论支持。