运动流场下的电极过程及其在约束刻蚀剂层技术中的应用

How to achieve super smooth surface with low residual stress and zero damage is the common problem in modern microelectronics, precision optical and aerospace field. With a view to the international development trend of nano manufacturing technology of super smooth surface processing, electrochemical, fluid dynamics, the ultra precision machining and testing, mathematical modeling and simulation of multidisciplinary knowledge were integrated in the project. In order to reveal the mechanism of the electrode process of interface between the electrode and the constraint etching agent layer under the slow motion flow, we will carry out the multidisciplinary cross basic research of the electrode surface etching agent concentration distribution mechanism induced by the flow field, the research of polishing processing mechanism under the coupling effect of the flow field and the CELT, the research of dynamic CELT etching polishing process and polishing electrode design and preparation technology. These studies will be to provide a reliable theoretical basis and technical support for achieving the high precision machining of the super smooth surface. Research results not only will provide a breakthrough on the study of the theory of the electrode process kinetics, but also will improve defence and aerospace technology. The project has important theoretical significance on the leap development of advanced science and technology application field.

低残余应力、无表面损伤的超光滑表面加工是现代微电子、精密光学和航空宇航等领域中的关键共性问题，本项目着眼于国际纳米制造技术中的超光滑表面加工发展趋势，综合运用电化学、流体动力学、超精密加工及检测、数学建模及仿真等多学科知识，针对慢速运动流场下电极/微纳米厚度的约束刻蚀剂层界面的电极过程这一关键科学问题，从运动流场对电极表面刻蚀剂浓度分布的影响机制，运动流场与CELT耦合效应下的抛光加工机理，动态CELT刻蚀抛光工艺以及抛光电极的设计与制备技术几方面开展多学科交叉基础研究，为实现超光滑表面的高效精密加工提供一种可靠的理论依据和技术支撑。不仅可以丰富电极过程动力学的理论研究，而且对于实现国防、航天等敏感领域的关键性技术提升，促进高精尖科技应用领域的飞跃性发展具有重要的理论意义。

建立了动态约束刻蚀过程物质传质的仿真模型，揭示了影响CELT抛光效果与抛光效率的主要工艺条件及其作用机制；设计并制备了用于抛光加工的刀具电极，搭建了用于运动约束刻蚀抛光的微纳电化学加工平台，实现了刀具电极往复平动抛光加工方法；对电极运动速度、电极与基底间工作距离、加工时间以及溶液配比进行了实验研究。使用响应面法分析了上述工艺参数对加工后表面的面形精度、表面粗糙度以及加工的材料去除率的影响规律；实现了对加工过程中溶液内部动态行为的跟踪分析。从微观角度揭示了实验过程出现的规律性现象的内在原因。不仅可以丰富电极过程动力学的理论研究，而且对于实现国防、航天等敏感领域的关键性技术提升，促进高精尖科技应用领域的飞跃性发展具有重要的理论意义。