气膜屏蔽微细电解加工方法研究

Considering the fabricaton of micro sturcture on metal surface with size from tens of micrometers to hundreds of micrometers in width and a few micrometer to tens of micrometers in depth with high efficiency and precision, a new micro-machining method, gas film shielding electrochemical micro-machining, was presented.The eletrochemical micromachining and the gas film protective technology are coupled. The eletrolyte was confined to the certain area because of the constraint of gas film on electrolyte, changing properties of electrolyte and shielding eletric field. The electric energy was concentrated in the specific region and then the localization, atability, efficiency and accuracy could be improved in micro-ECM. This project focuses on the basic sicentific problems including the mechanism of material erosion and eletrolyte flow characteristics in the intereletrode gap in the effect of gas film in micro-ECM, material erosion process in realtime and high precision cooperative control. And then the basic theoretical system for gas film shielding micro-ECM was established. Further researches were be done on the the key technologies such as machining process detection and control, non-contact visual adjusting-tool, high efficiency and localization processing. Through the studies of the project, a new micro-machining method is promising to be proposed and the manufacture of Micro/Meso scale micro structure on metal surface with high precision and high efficiency could be resolved.

为实现金属表面特征尺寸宽几十至几百微米、深几微米至几十微米微结构高效率、高精度稳定加工，基于微细电解加工技术和气膜保护原理，提出一种气膜屏蔽微细电解加工方法，利用气膜对间隙电解液的约束、电解液特性改变和电场屏蔽等作用，控制电解液聚焦于工具电极正对工件的区域内，使电场能量更多地集中于工件表面特定区域材料溶解，提高微细电解加工的定域性、稳定性、效率及精度。项目重点解决气膜屏蔽下微细电解加工材料去除机理、气膜屏蔽电解加工间隙流场分布特性及流动状态表征、复杂物理场作用下材料动态成形演变规律及高精度协同控制等基础科学问题，建立起气膜屏蔽微细电解加工基础理论体系；突破气膜屏蔽微细电解加工的加工特征提取与控制、可视化非接触对刀、高效率及高定域性成形加工控制等关键技术。通过本项目研究，有望实现一种新的微细加工方法，解决Micro/Meso尺度金属表面微结构高精度、高效率加工制造难题。

项目针对金属表面特征尺寸宽几十至几百微米、深几微米至几十微米微结构加工，提出了气膜屏蔽微细电解加工的方法。重点研究了气膜屏蔽下微细电解加工材料去除机理、气膜屏蔽电解加工间隙流场分布特性及流动状态表征、复杂物理场作用下材料动态成形演变规律及高精度协同控制、工艺数据优化等内容。通过本项目研究，揭示了气膜屏蔽下，微细电解加工间隙内电解液受气膜作用发生收缩，电场能力更多的集中于工具电极正对工件的表面，加工定域性、加工精度明显提高。针对项目研究中采取的阵列工具电极微结构加工，有效的提高了加工效率，通过对间隙流场的优化设计能够得到成形尺寸一致性较好的微结构。本项目研究方法可用于Micro/Meso尺度金属表面微结构高精度、高效率加工。