纳米超导单光子探测阵列器件的新技术与新方法研究

Single-photon detection technologies have been widely applied in the fields of communications, quantum information, fluorescence and Raman spectroscopy etc. Unfortunately, traditional technologies have their serious shortcomings, and therefore, limit their application and development. New "superconducting nanowire single-photon detection" is considered to be a potential, revolutionary technology, which has all the key breakthrough parameters, including scalability, broadband performance, high signal to noise ratio, quick response. In our project, a novel method, named polymer assisted deposition technology, is proposed to fabricate large-area uniform epitaxial ultra-thin films. Through revealing the general rules of the controlled growth in polymer assisted deposition process, developing new technologies to etch sharply-defined, uniform superconducting nanowire-array, investigating the relevance between the microstructure of ultra-thin films, nanowire configuration (including thickness, linewidth, linelength, line density, etc), and the performance of the SNSPD (efficiency, dark counts and temporal resolution, etc), high-efficient nanowire-array superconducting single-photon detection system will be realized, which will lay a solid foundation for the true realization of single photon camera. The study is expected to play an important role in promoting the level of basic research in physics, chemistry, information and other areas, and solving some of the basic science and key technical problems of the major national needs.

单光子探测技术在通信、量子信息、荧光和拉曼光谱学等领域有着广泛的应用需求，但传统的单光子探测技术存在显著的缺陷，严重制约了其应用和发展。新型的“超导纳米线单光子探测”被认为是一种潜在的、革命性的单光子探测技术，拥有所有关键参数的突破，包括可升级性、宽带效能、高信噪比、快速等。本项目利用聚合物配位金属离子形成均相前驱溶液，集物理和化学法的优势从分子层面控制外延超薄薄膜大面积均匀生长，通过揭示聚合物辅助沉积可控生长的一般规律，创建超导纳米线群组刻蚀的新技术，研究超薄薄膜微结构/纳米线形态（包括厚度、线宽、线长，线密度）与器件性能（检测效率、暗子数、时间分辨等）的关联性，实现高效的纳米线阵列超导单光子探测系统的开发，为真正实现实用化的单光子照相机奠定坚实的基础。这对于提升我国在物理、化学、信息等领域基础研究水平，解决国家重大需求中的一些基础科学与关键技术问题，有望起着重要的推动作用。

单光子探测技术在通信、量子信息、荧光和拉曼光谱学等领域有着广泛的应用需求，但传统的单光子探测技术存在显著的缺陷，严重制约了其应用和发展。本项目从新材料、器件新结构以及工艺实现等几方面展开研究，成功实现了新型超导单光子探测研究。本项目已经实现了预期目标，取得的创新成果如下：.1. 采用磁控溅射法在SrTiO3上生长了高性能单晶YBCO薄膜，以超薄多孔氧化铝AAO做模板，用反应离子刻蚀的方法，得到了具有纳米蜂巢周期性结构的YBCO薄膜，通过调控纳米蜂壁厚实现了从超导态到金属态再到绝缘态的量子相变，并且首次在各个态都清晰地观测到了库伯对的量子磁通震荡。.2. 通过反应磁控溅射技术和聚合物辅助沉积技术，成功制备了高性能的5nm厚的NbN超导薄膜，利用电子束刻蚀技术制备宽度为100 nm以内且宽度均匀边缘整齐的迂回超导纳米线，并制备接触电极，最终将其组装为超导纳米线单光子探测器（SNSPD）。.3. 运用超快激光pump-probe技术对其YBCO多孔薄膜电荷动力学进行了研究，研究了光子在超导体内激发大量的热电子的弛豫行为，证明了其热电子ps量级的超快弛豫时间。成功实现了人工纳米孔超导绝缘相变的YBCO薄膜的新型单光子器件的制备。为下一步实现高速的中红外单光子探测器以及阵列打下了坚实的实验和理论基础。.4. 发表SCI收录论文17篇，其中Advanced Functional Materials论文3篇；获授权中国发明专利4项，正申请中国发明专利4项；撰写中文专著1部，邀请报告3人次。培养博士生1名，硕士3名。.全部达到了预期目标。