微波线形等离子体源非线性耦合调控机理及关键技术研究

With the rapid development of plasma applications in the fields of large-scale integrated circuit and surface treatment, the steady, large-area-uniformity, and high-density plasma sources have gathered much attentions worldwidely. Combining theoretical and experimental research methods, this project is to investigate the high-performance microwave linear plasma with the combination of microwave antenna and magnet design. Utilizing diagnostic tools including the Langmuir probe, the optical emission spectrum etc, the spatial distribution characteristics of the plasma parameters including plasma density, electron temperature, electric potential etc, is to be investigated in the linear microwave plasma; Combining a coupled system of Maxwell's equations and continuity equations, the electromagnetic wave propagation and plasma generation mechanisms were numerically investigated; Establishing the model of inverse problem, the experimental conditions and modulation method will be optimized, and the correlative mechanism between the microwave antenna, magnet configuration and the stabilization and the uniformity of microwave linear plasma will be modified. By the investigation of the project, the characteristics of the microwave linear plasma with the utilizations of microwave antenna and magnetic field will be revealed; the nonlinear coupled mechanism between the electromagnetic wave and magnetized plasma will be clarified; the generation conditions and optimization methods for microwave linear plasma with uniform plasma distribution along axis direction will be obtained. The fundamental basis for realizing high-density, large-area-uniformity and stable non-equilibrium plasma sources will be established.

随着低温等离子体技术在大规模集成电路、表面工艺等领域应用的迅速发展，稳定、大面积均匀、高密度等离子体源技术成为近年来亟待解决的关键问题和研究焦点。本项目拟将微波天线与磁场设计技术相结合，采用理论与实验相结合的研究方法，进一步围绕开发高性能微波线形等离子体源展开研究。利用Langmuir探针、发射光谱等诊断工具，研究天线类型、磁场位型对等离子体参数空间分布的影响；结合经典电动力学理论与电子流体力学理论，研究电磁波传输及等离子体产生机制；建立反问题模型，优化实验条件和调控方法，修正天线类型、磁场位型与微波线形等离子体源稳定性、均匀性关联机制。通过本项目的研究，明晰不同天线类型、磁场位型作用下微波等离子体参数空间分布的特性；阐明电磁波与磁化等离子体非线性耦合机制；掌握微波线形等离子体密度轴向均匀分布的产生条件和优化方法。为获得高密度、均匀、稳定的等离子体源技术奠定实验与理论基础。

随着低温等离子体技术在大规模集成电路、表面工艺等领域应用的迅速发展，稳定、大面积均匀、高密度等离子体源技术成为近年来亟待解决的关键问题和研究焦点。本项目拟将微波天线与磁场设计技术相结合，采用理论与实验相结合的研究方法，进一步围绕开发高性能微波线形等离子体源展开研究。利用Langmuir探针、发射光谱等诊断工具，研究天线类型、磁场位型对等离子体参数空间分布的影响；结合经典电动力学理论与电子流体力学理论，研究电磁波传输及等离子体产生机制；建立反问题模型，优化实验条件和调控方法，修正天线类型、磁场位型与微波线形等离子体源稳定性、均匀性关联机制。通过本项目的研究，明晰不同天线类型、磁场位型作用下微波等离子体参数空间分布的特性；阐明电磁波与磁化等离子体非线性耦合机制；掌握微波线形等离子体密度轴向均匀分布的产生条件和优化方法。为获得高密度、均匀、稳定的等离子体源技术奠定实验与理论基础。通过本项目的实施，从理论上建立了微波线形等离子体三维模型，分别分析了无磁场无反射天线（1）、有磁场无反射天线（2）、无磁场有反射天线（3）、有磁场有反射天线（4）时等离子体密度、活性粒子及其均匀性的分布，结果表明相比较情况1，情况2平均等离子体密度提高36.67%，均匀度变化不高；情况3平均等离子体密度提高3.75，均匀度略有提高；情况4平均等离子体密度提高31.12%，均匀度略有降低。在实验上，利用发生光谱对600mm长微波线形等离子体源进行了光谱诊断和电子密度、电子温度及其轴向均匀度计算分析。实验结果表明：在双端300W微波馈入、30Pa氩气氛下电子密度和电子温度分别约4╳1018m-3和0.8eV，随着微波功率从双端300W提高到500W，电子密度提高至5╳1018m-3，电子温度基本不变；随着放电气压从30Pa提高至50Pa，电子密度提高至5.5╳1018m-3，电子温度略有降低。电子密度和电子温度均匀度在30Pa、双端500W时最高，分别为±9.4%和±5.3%。