精细陶瓷高功率皮秒激光高效高精去除机理及关键技术研究

According to the processing problem of advanced ceramic (such as Al2O3 and ZrO2) which should be consideration to high precision and high efficiency together, a noval approach by application of high-power picosecond laser (ps) to overcome the shortcoming of low-efficiency of femtosecond laser processing and low-precision of nano/micro-second laser processing is presented. To research the mechanism and critical techniques of high efficiency and precision removal of ceramics by high-power picosecond laser is the topic of the applied project. By research, energy absorption, tansmission and deposition during ps laser irradiated on ceramic dielectric material will be discussed; the threshold law and phenomena of ps laser "cool removal" of ceramics will be studied. The influence of the phase structure and micro structure of the ceramics on the ps laser removal effect will be also paid attention. The limitation of removal efficiency and precision by ps laser processing of ceramics will be predicted. The model of process control can be obtained on the basis of the systematic study. The removal precision per pulse of 10-100nm, the removal efficiency of ≥ 1mm3/min and the processing shaping resolution of ≤ 100 μm under the depthe to width ratio of 1:1 are the technological results would be obtained of the project. The research is aimed to provide scientific and fundamental technical support for the development of high-power ps laser intelligent processing of the ceramics in the laser advanced manufactureing field.

本项目针对Al2O3、ZrO2等典型精细陶瓷加工所面临的效率和精度必须兼重的问题，提出采用高功率皮秒激光解决面向工程应用中飞秒激光加工效率低、纳/微秒激光加工精度低的研究思路，研究高功率皮秒激光实现陶瓷非金属难加工材料高效高精去除的机理及其关键技术。以期获得不同波长（紫外/可见/红外）高功率皮秒激光作用于陶瓷介电材料的能量吸收及输运机制信息，获得皮秒激光对陶瓷材料"冷去除"的阈值态信息，分析陶瓷结构对皮秒激光去除作用的影响，预测典型陶瓷皮秒激光的去除效率和精度极限，实现高效高精可控去除的工控模型。技术上，实现Al2O3、ZrO2等精细陶瓷单脉冲去除精度10-100nm之间可控，去除效率 ≥ 1mm3/min可控，去除工艺成形分辨率可达到当前电子陶瓷基板精细布线槽工艺要求，在深宽比1:1的条件下≤ 100 μm。项目为推动高功率皮秒激光在陶瓷智能化激光先进制造领域的发展提供科学性的基础支持。

本项目针对实现高功率皮秒激光高效高精可控加工精细陶瓷所必须解决的基本科学问题，同时也是应用开发所面临的直接问题，系统研究了皮秒（< 10ps）脉宽高能光子对Al2O3、ZrO2等典型精细陶瓷的去除作用机理，分析皮秒激光作用“冷去除”与“热烧蚀”阈值态，研究了皮秒激光对陶瓷特征晶相结构及显微结构的作用特征及相互影响，在实现皮秒激光对陶瓷去除效率大于1.3 mm3/min的同时亦获得了直接去除表面粗糙度可至百纳米级的高精可控去除效果，并通过工艺控制模型的建立与分析，系统地研究了精细陶瓷皮秒激光高精高效可控去除机制。研究中，相关关键技术已有工程性应用体现，显示出课题研究的重要科学意义和良好的应用前景。