面向微结构表面超精密加工的纳米驱动、感知一体化智能进给单元集成设计与调控方法

Diamond ultra-precision cutting is an important approach to optical microstructure surface machining, in which the tool is driven by an extra feeding unit reciprocating with high frequency along z-axis on ultra-precision lathe for complex and efficient cutting. Towards the ultra-precision cutting of microstructure surface, an integrated design method is proposed in this project for intelligent feeding units with sensing and actuating functions; the multi-dynamic hysteresis nonlinearity of piezoceramic output distance and its hybrid tracking control method is performed for precise feeding; with adaptive capability of system disturbance, a distributed structure is presented to detect and balance tool vibration; meanwhile, based on the monitor and characterization of tool wear during cutting process, real-time tool trajectory is compensated dynamically with prediction of multi-parameter fusion neural network. By such integration design and control, an intelligent feeding unit with high stiffness, high precision and high frequency response is achieved. The theoretic value of this research is essential to facilitate machining equipment of microstructure surface components for both military and civil use. Moreover, its economic importance is also tremendous in the enhancement of conventional lathe machining capability.

金刚石超精密切削是光学微结构表面加工的种重要加工方法，通过在超精密机床上增加进给机构驱动刀具沿Z轴产生高频响的精密进刀运动，实现复杂微结构表面的高效切削。本项目面向微结构表面超精密切削，提出感知、驱动一体化智能进给单元的集成设计方法，建立压电驱动的多动态耦合迟滞非线性模型并提出基于位移混合追踪控制的切削微进给调控方法，基于分布式振动检测与控制结构提出对环境扰动具有自适应能力的刀具振动调控方法，通过切削状态监控建立刀具磨损表征方法和磨损量对加工表面粗糙度的影响规律，并基于多参数融合神经网络对刀具磨损状态下的动态切削轨迹进行预测和在线补偿，实现具有高刚度、高频响、高精度的刀具微进给单元智能化和集成化。研究成果不但对提升军用和民用领域中微结构表面器件的加工装备具有重要的理论价值，并且能够在不改变机床现有结构的条件下，极大地提高常规机床的加工能力，具有巨大的应用前景和经济价值。

本项目面向微结构表面超精密切削，针对快刀伺服加工中存在的加工行程短、切向颤振、空间运动及高次轨迹联动控制能力受限等问题，研究感知-驱动一体化智能刀具进给单元的集成设计方法；基于多层神经网络建立进给驱动的多动态耦合迟滞非线性映射关系，提出切削微进给的调控方法；对于变切削参数条件下的未知振动和干扰，建立了单自由度切削再生颤振模型，获得了切削稳定性曲线，提出了基于压电元件的刀具颤振抑制和调控方法，实现具有多自由度及高次轨迹联动控制能力的高刚度、高频响、高精度的刀具智能进给单元的集成化设计与调控，对具有非回转对称的微结构表面及自由曲面的超精密加工具有重要意义。研究成果不但对提升军用和民用领域中微结构表面器件的加工装备具有重要的理论价值，并且能够在不改变机床现有结构的条件下，极大地提高常规机床的加工能力，具有巨大的应用前景和经济价值。