超声振动辅助高速精密内圆切片耦合动力学机理及应用技术研究

Slicing of hard brittle material has very wide applications, and the inner-diameter saw slicing is current main method with an irreplaceable broad market space. However, the technology of available inner-diameter saw slicing is not perfect, and there are many technological difficulties for the high efficient and precision machining of hard brittle material in big diameter. In the view of resources saving, efficient utilization, precision/high-end machining, and cost cutting, this project intends to combine the inner-diameter saw slicing with ultrasonic vibration technology for hard brittle material machining, to propose and study a new technology on efficient and precision inner-diameter saw slicing for big dimension workpiece, and a prototype machine tools of high speed inner-diameter saw precision slicing with ultrasonic vibration assistance will be developed; By coupling theoretical research and experimental testing, this project will model the tensioning of inner-diameter saw blade in statics and dynamics, propose a suitable tensioning scheme by optimal design; A gas-fluid-heat-solid multi-field coupling dynamic model will be built and analyzed for the high speed inner-diameter saw precision slicing with ultrasonic vibration assistance, and an accurate design of slicing processing parameters can be presented to improve slicing processability and slice surface quality in the view mechanical dynamics; By involving the functions of processing optimization, status prediction, query searching, management and maintenance, scheme development and output, this project will develop a machining database software of typical hard brittle material for the high speed inner-diameter saw precision slicing with ultrasonic vibration assistance, and the software will be beneficial to realize an efficient stable precision slicing of hard brittle material and promote a direct application of the project research achievements.

硬脆材料切片应用十分广泛，内圆切片方法是目前切片加工的主要手段之一，拥有不可替代的宽广市场空间，但其现有技术并不完善，在硬脆材料大直径、高效率、超精密加工等方面存在技术瓶颈。从资源节约、高效利用、精密高端、成本低廉角度出发，本项目拟提出将硬脆材料内圆切片与超声振动加工技术相结合的方案，开展新型大尺寸高效超精密内圆切片技术基础研究，试制超声振动辅助高速精密内圆切片机样机；理论研究与实验测试结合，建立内圆锯片刀片张紧静力学和动力学模型，优化设计制定最佳张紧方案；开展超声振动辅助高速内圆切片加工过程气-液-热-固多场耦合动力学建模与分析，面向加工性能改善和切片面形品质提升，从机械动力学角度实现工艺参数的合理设计；开发具有工艺优化、工况预测、检索查询、管理维护、方案制定和输出等功能的典型硬脆材料超声振动辅助内圆切片加工数据库软件，实现硬脆材料的高效稳定精密切片加工，促进项目研究成果的直接应用。

半导体硅、陶瓷和玻璃等硬脆材料，在日常生活和工业生产中有着广泛应用。作为硬脆材料切割和切片加工的主要手段之一，内圆切片方法与多线切片方法相比具有诸多优点，拥有不可替代的宽广市场空间。然而，现有内圆切片技术并不完善，对于硬脆材料精密加工存在技术瓶颈。本项目提出了将硬脆材料内圆切片与超声振动加工技术相结合的崭新方案，开展了新型精密内圆切片技术研究。分析了内圆刀片的张紧特性，从解析理论、有限元仿真及试验测试三个方面，揭示和验证了内圆刀片振动位移、固有频率及刚度等重要参数随张紧位移的变化机理，给出了内圆刀片张紧的实用化最优方案。建立了内圆切片加工过程系统动力学模型，根据刀片振动特性理论阐释了切片表面形貌成型机理。开展了超声振动辅助内圆切片新型混合加工技术研究，制定了超声振动辅助内圆切片加工方案，提出了超声装置设计和测试新方法，研制了超声振动辅助高速精密内圆切片机样机，自制了切片面形质量测量检测装置，开展了改善加工性能和提升切片面形品质的工艺参数研究，开发了典型硬脆材料内圆切片加工数据库软件，实现了硬脆材料的高效稳定精密切割和切片加工。本项目为硬脆材料精密切割和切片加工提供了新方案，相关研究成果对超声类加工技术基础研究和工艺优化具有重要的意义和价值。截至目前，本项目共计发表研究论文9篇，其中SCI论文6篇，中科院分区二区高质量论文4篇；申请发明/实用新型专利7项，其中发明和实用新型双申6项，已授权实用新型7项；开发普通和超声振动辅助通用型内圆切割/切片加工数据库管理软件1套，试制弯曲振动超声加工装置的动态特性测试独立样机1台、超声振动辅助高速精密内圆切片机独立样机1台、三维表面轮廓跟踪测量精密调整和采集装置独立样机1台；项目组2人晋升为教授职务，培养博士研究生1人、硕士研究生3人，其中获吉林大学优秀硕士毕业论文1人。