微纳结构增强VO2动态自适应智能热控器件制备及性能研究

With the implementation of strategic space missions in China, traditional thermal regulation technologies are hard to meet the alternating space thermal environment due to their fixed emissivity. Although the existing VO2 smart thermal regulation device can dynamically adapt its emissivity, it possess high solar absorpance and small emittance tuneability, which restrict its practical application. Micro-structure can break through the limit of spectral regulation, and thus provides a new way for resolving the problem of the conflict for lowering the solar absorpance and enlarging the emittance tuneability of VO2 smart thermal regulation. this project will take the dynamicly adaptive multi-wavelength spectra regulation by combined its thermochromic property with micro-structures. The VO2 micro-structure will be designed and prepared to reduce the solar absorptance and increase emittance tuneability, which is based on the size effect of the micro-structure spectral regulation. The key research will be the regulation mechanism of micro-structure on spectral at both solar radiation wavelangth and infrared wanglength. Especially, the spectral evolution mechanism of micro-structure in the change process of optical constant will be emphatically explored. And then, the micro-structure enhanced VO2 adaptive smart thermal regulation device will be fabricated by integrating High Power Pulsed Magnetron Sputtering and Reactive Ion beam Etching technology. Finally, the performance evaluation system of VO2 smart thermal regulation device will be established to provide theoretical support for the new thermal regulation technology in China by combining the phase transition property with the measured solar absorptance and emissivity.

随着我国重大空间任务的实施，传统热控技术发射率固定，难以满足空间交变温场。现有VO2智能热控器件虽然发射率可变，但因太阳吸收比高，红外发射率变化值小，限制了其实际应用。微纳结构能够突破光谱调控性能极限，为解决VO2智能热控降低太阳吸收比和提高红外发射率变化值相互制约的难题提供了新思路。本项目拟将微纳结构与VO2热致变色特性结合，基于微纳结构光谱调控的尺寸效应，开展多波段动态自适应光谱调控研究。设计并制备VO2微纳结构，重点研究微纳结构对太阳辐射波段和红外波段光谱特性的调控机理，着重探索微纳结构在光学常数变化过程中光谱调控的演变机制，降低太阳吸收比，增大红外发射率变化值。集成高能脉冲磁控溅射和反应离子束刻蚀技术，获得微纳结构增强VO2动态自适应智能热控器件。测试器件太阳吸收比和红外发射率，结合VO2相变特性，建立VO2智能热控性能评价体系，为我国新型战略热控技术提供理论支持。

本项目完成了智能热控器件的设计、制备及其性能评价研究，并阐释了VO2智能热控器件的光热调控机理。首先研究了不同基底VO2薄膜的红外调控特性，设计了基于VO2的智能热控器件，实现了红外发射率大幅度变化。探索了高能脉冲磁控溅射VO2制备工艺，突破了低温VO2薄膜制备技术，获得了VO2智能热控器件的生产工艺。开展了VO2智能热控器件地面散热验证试验，阐明了VO2智能热控光热调控机理。在本项目的支持下，在Adv. Mater等高水平期刊发表SCI 论文 20 篇；授权 9 项中国发明专利。本项目研制的智能热控器件入选行星际探测国家重大专项和空间站科学搭载试验。