光学微结构阵列成形用模具制造方法及其关键技术研究

Optical glass microstructure array delivers excellent imaging characteristics as well as diffraction characteristics, which is widely used in the optical system. Glass molding press (GMP) is deemed as one of the most promising methods to produce optical microstructure array, and one of the most important key technologies is the mold manufacturing technique. This project aims at long service life mold development for optical glass microstructure array forming. Electroless plated Nickel Phosphorus (Ni-P) is proposed as a new mold material for optical microstructure array machining, which achieve the minimization of the microstructure unit and the maximization of the array area. Thermal treatment is proposed to transform the Ni-P from glassy state to crystalline state, so as to improve the mold high temperature hardness. Finally, by designing the shape of the diamond cutter and optimizing the machining condition of the single point diamond cutting, the processing defects, such as micro fractures and burrs, will be restrained, and precise microstructure array with extremely small periodical size units on a large surface will be generated. Through this research, a new method of manufacturing microstructure array mold was established. With the breakthrough of this technology, the electroless plated Ni-P will be promoted as a new material for long life mold used in high temperature molding. Furthermore, the glass molding press method to produce optical microstructure array will be improved.

光学玻璃微结构阵列既有良好的成像特性，又有良好的衍射特性，在光学领域有着广泛的应用。玻璃模压成形技术作为光学微结构阵列批量生产的最优方法之一，其核心技术瓶颈在于微结构阵列模具的超精密制造技术。本项目以开发适用于光学微结构阵列玻璃模压成形中使用的高精度长寿命模具为研究目的，提出了利用无电解磷化镍Ni-P镀层材料作为模具材料，通过切削加工微结构阵列的方法，实现微结构阵列单元尺寸极小化和总体面积极大化。并提出了利用热处理工艺使无电解磷化镍Ni-P从玻璃态转化为多晶态的方法，以增强模具的高温硬度特性。最后，通过设计金刚石刀具形状参数，优化单点金刚石微切削工艺，抑制毛刺、微细裂纹等加工缺陷的产生，在大面积范围内加工出周期尺寸极小的微结构阵列，建立微结构阵列模具制造的新方法。此项技术的突破必将推动磷化镍Ni-P作为一种新型材料在长寿命耐高温模具中的开发和应用，并进一步推动光学微结构阵列成形技术的发展。

光学玻璃微结构阵列因其良好的成像特性、良好的衍射特性广泛应用于光学领域。玻璃模压成形技术可以高效率、高精度加工光学玻璃微结构阵列，耐高温微结构阵列模具的超精密制造是关键核心技术。为开发适用于光学微结构阵列玻璃模压成形中使用的高精度长寿命模具，提出了利用无电解磷化镍Ni-P镀层材料作为模具材料，利用超精密切削技术，实现了微结构阵列模具制造。针对模具高温高压工作条件下易变形、易磨损的现象，提出了利用热处理工艺使无电解磷化镍Ni-P从玻璃态转化为多晶态的方法，增强了模具的高温硬度特性；并开发了磷化镍石墨烯复合镀层进一步改善模具服役性能。通过金刚石刀具参数与微切削工艺参数优化，成功地抑制了毛刺、微细裂纹等加工缺陷的产生，在大面积范围内加工出周期尺寸极小的微结构阵列，建立微结构阵列模具制造的新方法。