强韧化高耐磨类石墨非晶碳基薄膜多尺度耦合设计与形性调控

Graphite-like carbon film, which possesses the property of low internal stress and high environmental suitability, is a class of amorphous carbon-based films with important potential applications. However, problems still exists, such as the difficulty in matching and coordinating multiple physical properties of film and heavy reliance on experience of film design and deposition. Based on the idea of multi-scale coupling design, this project aims to comprehensively apply the methods of gradual transition, gradient lamination, doping modification, nanocrystalline/amorphous strengthening to the systematic study on the relationship between macro/micro structure and properties of graphite-like carbon film. Through optimal regulation on key indicators of the film such as process parameters of deposition, energy of ion bombardment, ratio of doping element, we will achieve the preparation technology of strengthening-toughening and doping modified nano-multilayer graphite-like carbon film and the adjustment strategy of key technological parameters. The results will uncover the thermal/dynamics mechanism of how the ion bombardment affects the dynamic forming process of films, explore the synergistic effect between multi-interface structure and nanocrystalline/amorphous strcuture, and their essential relevance with the film strengthening-toughening property. On this basis, we will further study the law of structural evolution and the worn mechanism of films under different friction conditions, and build up the film cross-scale friction damage model. This project will provide a feasible method for implementing the coordination and match between the mechanical property and the tribological property of graphite-like carbon film. It will also offer essential data for the design and preparation of graphite-like carbon film that used under harsh conditions. In this way, this project will help to further promote the fundamental research and engineering application of graphite-like amorphous carbon film.

类石墨薄膜内应力低、环境适应性强，是一类具有重要应用潜力的非晶碳基薄膜，但依旧存在薄膜多物理性能难以匹配协调、薄膜设计制备严重依赖经验等问题。本项目基于多尺度耦合设计思想，拟综合运用渐进过渡、梯度叠层、掺杂改性、纳米晶/非晶强化等手段对类石墨薄膜宏微观构性关系开展系统研究，通过对薄膜沉积工艺参数、离子轰击能量、掺杂元素配比等关键指标的优化调控，获得强韧化掺杂改性类石墨纳米多层薄膜制备工艺及关键工艺参数调整策略，揭示离子轰击对薄膜动态成形过程的热/动力学作用机制，探究多界面结构与纳米晶/非晶组织的协同效应及其与薄膜强韧化特性的本质关联。在此基础上，研究薄膜在不同摩擦工况下的结构演变规律及磨损机制，建立薄膜跨尺度摩擦损伤模型。本项目的研究将为实现类石墨薄膜力学性能与摩擦学性能的协调匹配提供可行方案，为面向苛刻工况应用的类石墨薄膜设计、制备提供基础数据，进一步推动类石墨薄膜的基础研究与工程应用。

类石墨薄膜（GLC）在具有与传统非晶碳基薄膜相当的硬度和减摩耐磨性能的同时还可表现出内应力低，结合强度高，热稳定性好、承载能力高等独特性质，为实现非晶碳基薄膜在更加苛刻环境下的应用开辟了可能。但传统的GLC薄膜存在多物理性能难以协调匹配和薄膜设计制备严重依赖经验等问题，薄膜质量和性能难以满足实际应用需求。本项目从薄膜制备工艺改进和结构多尺度耦合设计两方面入手，研究了GLC薄膜的宏微观构性关系，提出了薄膜摩擦学性能与力学性能协调匹配的调控方案。研究内容主要包括：创新构筑了集梯度过渡、纳米晶/非晶复合以及纳米交替多层于一体的类石墨薄膜结构体系；提出了薄膜制备装置和关键沉积工艺参数的调整策略；揭示了离子轰击对薄膜积聚成形、界面构筑以及微纳结构生长的动态成形过程的热/动力学作用机制；探究了W掺杂在薄膜中形成的纳米晶/非晶组织对薄膜微观结构和宏观性能的影响机制；阐释了薄膜中多界面结构与纳米晶/非晶组织的协同作用机制及其与薄膜强韧化特性的本质关联；研究了纳米多层复合薄膜在宽载荷/广速率条件下的结构演变规律和损伤失稳机制，初步建立了“结构设计—制备成形—质量控制—性能调控”之间的映射关系和薄膜跨尺度摩擦损伤模型。项目研究成果可为进一步阐明类石墨薄膜微观结构与宏观性能的本质联系，掌握薄膜沉积质量的调控方法提供思路，为面向苛刻工况应用的类石墨薄膜设计制备提供重要支撑。