基于溶液法有机场效应晶体管的低电压、高灵敏压力传感器的研究

The pressure sensors have promising applications in the fields of humanoid robotics, intelligent medical prosthesis, electronic skin, medical monitoring. The unique advantages of organic field-effect transistor (OFET) technology makes it the ideal choice for developing pressure sensors. However, how to design the device structure to achieve the low operation voltage and highly sensitive OFET pressure sensor unit and high resolution array with solution process is the key challenge of the OFET pressure sensors, which need to be solved for practical application. Based on the research of the low voltage OFET device and pressure sensors in the early stage, this project will integrate the pressure sensitive film with the low voltage OFET, investigate the influence of the capacitance of the OFET insulator, the thickness and morphology of the pressure sensitive film to the performance of OFET pressure sensors, and develop the solution process of sensing pixel and array with 1T structure. This project will further develop the optimization theory and the technology solution based on the device toward practical sensing systems.

柔性压力传感器在仿生机器人、智能假肢设备、电子皮肤和医疗健康监控等领域都有重要的应用需求。有机场效应管(organic field-effect transistor, OFET）技术以其独特的优势使其成为发展压力传感器的理想选择。然而，如何基于OFET通过器件结构设计并以溶液工艺实现低电压、高灵敏的OFET传感器与高分辨率的传感阵列，成为OFET压力传感器急需解决的问题。本项目拟在前期溶液法加工低电压OFET器件以及压力传感器的工作基础上，研究以压力敏感薄膜与OFET构建的压力传感器的中OFET绝缘层电容、压力敏感薄膜表面的形貌和尺寸对传感器的压力敏感特性的影响，发展由单个OFET构成的1T结构传感像素单元和阵列的溶液法/印刷集成工艺，并以此为基础构建传感应用的优化方案和系统集成方案。

利用有机场效应管(organic field-effect transistor, OFET）构建压力传感器有利于传感器灵敏度的提升，便于后续的信号处理以及构建高分辨传感阵列。该项目将电容式压敏薄膜与小栅绝缘层电容的低电压OFET器件集成构建了IT结构的高灵敏的压力传感器，发展了优化的集成结构和理论模型；发展了基于溶液法/印刷加工工艺的压敏薄膜，分别实现了压敏薄膜的大电容变化和高灵敏性，适用于两种集成结构的OFET压力传感器件；使用柔性刮刀涂布工艺发展了OFET阵列高性能、均一化的制备，大面积、性能均一的OFET阵列的制备打下基础；发展了高可靠性的电学连接方法和表面电极的结构设计，为实现低串扰、高精度检测的OFET阵列的打下基础；最后，利用压力传感阵列实现了对轻质物体的识别。该项目的研究发展柔性OFET压力传感单元及高分辨率阵列的溶液法/印刷加工工艺、优化设计理论模型及系统集成技术，为基于OFET的压力传感器的实际应用打下基础。