标准圆锥光束实现微小角度测量原理与自校准机理研究

The high-end military industry relies on the accuracy of the measured values, and the current international highest micro angle measurement technology is in Germany. Facing the present situation of Chinese ban on the foreign high accurate autocollimator products and the self demand of the cutting-edge technology, in this project, a new measuring method for small angle measuring with independent intellectual property rights is studied, including its basic principle and key technologies of measurement. Monochromatic light through the Fabry Perot etalon produces a series of standard cone beam which is used for measuring beam, and the micro angle can be obtained from the concentric rings of lens imaging. The micro angle measurement model is based on the "relative measurement principle" and "mathematical statistics". In-depth study of the optical system (etalon characteristics, lens characteristics) effect is taken, to optimize the measurement model. Key studies are carried out on the "virtual pixel segmentation and data smoothing principle" and "multiple regression for peak coordinate subdivision principle” , to make the uncertain systematic error randomized, and further to improve the measurement accuracy. The experiments are conducted to verify the measurement model. The simulation analysis and optimization of measuring light system are carried out. Self calibration mechanism and traceability research based on decimal number law are carried out, and the angle measurement results are traced to the standard wavelength. The project is going to analyze and control the sources of measurement uncertainty to achieve the accuracy of 0.01" in ±40", making the technology of angle measurement in the forefront of the world.

高端军事工业依赖测量值的准确度，当前国际最高微小角度测量技术掌握在德国。面对产品对中国禁售现状，以及尖端技术自有化需求，项目研究一种具有自主知识产权的新型微小角度测量方法，对其测量基本原理和关键技术进行研究。单色光谱光经法布里珀罗标准具产生一系列测量用标准圆锥光束，利用该光束经透镜成像的同心圆环实现角度计算。建立基于“相对测量原理”和“数理统计方法”的微小角度测量模型；深入研究光学系统（标准具特性、透镜特性等）的影响，优化测量模型；重点研究“虚拟像元细分与数据平滑原理”、“多元回归求峰位坐标细分原理”的应用特性，使未定系统误差随机化，进一步提高测量准确度。项目进行实验验证，仿真分析并优化测量光路；开展以小数重合法为基础的自校准机理和溯源特性研究，将角度测量结果溯源至标准光波长。本项目拟通过对不确定度来源的分析与控制，使角度测量结果在±40″内准确度优于0.01″，令我国测角技术居世界前列。

项目以突破技术封锁、实现自主化高端测角设备为目标，开展了基于标准圆锥光束的高准确度测角技术的原理和实验研究。1）开展了基于标准圆锥光束实现微小角度测量的原理性研究。建立了基于相对测量原理的微小角度测量模型，确立了测角系统的基本过程和数据处理方法，为微小角度测量装置的实现确定基本路径和方案。2）开展了标准圆锥光束构建关键技术及测量光路光学系统的研究。深入分析了F-P标准具特性参数对干涉成像圆环质量的影响，基于光学薄膜原理提出了用于修正F-P标准具高反射膜引起反射相移的方法，开展了透镜的波前像差及畸变测量研究并实现成像质量的评价，为测角系统的优化提供了理论基础。3）开展面阵像元细分和同心圆环规模数据处理方法的研究。提出并实现了基于一次坐标转换和二次坐标转换的虚拟像元细分技术，提出并实现了多弦中心平均法用于圆心坐标的计算并对其取弦数目及取样间隔进行优化，提出了基于高斯型权因子和(n, m)型权因子的局部峰位坐标计算方法，为提高角度测量准确性提供了更为有效的数据处理方法。4）开展微小角度测量不确定度评定方法和溯源体系的研究。建立微小角度测量不确定度评价模型，全面分析了测量系统误差并进行补偿，开展了基于改进小数重合法计算F-P间隔以实现自校准的研究并重点修正了算法及温湿度误差的影响，建立溯源体系并开展不同焦距成像物镜和不同F-P间隔下的角度测量实验，为微小角度测量指标的评定提供完备的方案。5）开展微小角度测量仪实用化研究。设计微小角度测量仪原型装置并开发系统软件程序，测试实验验证其测角精度指标已达到德 ELCOMAT HR水平，为微小角度测量技术的实用化提供坚实的技术基础。项目还开展了子孔径拼接算法自由曲面测量、转台测角误差分析与补偿、长度和角度等新干涉测量方法的研究，是对本研究内容的有益扩展。项目为促进我国精密测试行业的发展提供了显著的理论和技术基础。