面向高性能微型锂离子电池的新型碳/硅微纳分级结构制造方法

The rapid development of multi-functional and highly integrated microdevices mainly relies on the development of high performance micro battery. However, the existed micro batteries are unable to satisfy the severe requirements of microdevices. It is urgent to propose innovative design of electrode structures and manufacturing methods. Therefore, low-cost and mass manufacturing approach for novel carbon/silicon micro/nano hierarchical structure electrodes will be explored towards the application for high performance micro lithium-ion battery. The novel carbon/silicon micro/nano hierarchical structures array will be fabricated through effectively combining nano-imprinting, oxygen plasma etching, silicon nanofilm sputtering and pyrolysis processes, with silicon nanoparticles modified photoresist as starting material. The fabrication of photoresist/silicon hybrid structures and the oxygen plasma etching mechanism will be studied systematically. Then the study will be focused on investigating the integration of silicon film to micro/nano hierarchical structures and the pyrolysis mechanism and stability regulation of silicon film protected micro/nano hierarchical structures to prevent the collapse of micro/nano structures during pyrolysis process. The novel carbon/silicon micro/nano hierarchical structures array with nanostructures fabricated in the inner and outer parts will be obtained and they will show enhanced electrochemical performance. Finally, through measuring the properties of structures and developing micro lithium-ion battery prototype, the manufacturing approach will be verified and optimized. The study will provide new approach for micro/nano manufacturing, and advance the further development and application of microdevices.

多功能和高集成度微器件的快速发展，极大地依赖于高性能微型电池的成功研制。然而，现有微型电池性能尚无法满足微器件苛刻的使用需求，亟待研究提出创新的电极结构设计和制造方法。为此，本项目拟面向微型锂离子电池的应用需求，研究提出新型碳/硅微纳分级结构的电极制造方法。通过在光刻胶中掺入硅纳颗粒作为前驱体，结合纳米压印、氧等离子体刻蚀、硅纳米镀膜和热解工艺制造新型碳/硅微纳分级结构阵列。研究过程中，将系统研究光刻胶/硅复合结构的制备及氧等离子体刻蚀机制。在此基础上，为得到内部和外部均为纳结构的新型碳/硅微纳分级结构以提高电极电化学性能，避免热解过程中结构内部塌陷，将重点研究硅膜在微纳分级结构表面的集成，及硅膜保护下微纳分级结构的热解机理和稳定性调控。最后，通过测试结构性能并封装微型锂离子电池原型，验证和优化制造方法。研究结果将为微纳制造技术提供新思路，并推动微器件的进一步发展和应用。

高性能微型能量存储系统的发展有利于微机电系统的快速发展。然而，现有的微型能量存储器件的性能无法满足需求，急需研究设计新型的电极结构和低成本的制造方法。本项目通过调控光刻和氧等离子体刻蚀工艺的制造参数，并对光刻胶进行修饰，结合光刻、氧等离子体刻蚀、热解工艺，研究提出新型的具有内孔的碳微纳分级结构集成电极制造方法。创新性的提出将耐高温不锈钢基底引入碳微机电系统工艺中，重点揭示氧等离子体刻蚀过程中硅纳米颗粒、反应腔体以及不锈钢衬底中的金属元素所起的掩膜作用。并研究了悬浮结构在热解过程中产生的应力诱导形成新型碳微纳结构的机理。在此基础上，测试所得新型碳微纳分级结构的电化学性能。将其与活性二氧化锰纳米薄膜集成，表现出优异的微型超级电容性能。将碳微纳结构与氧化铜纳米颗粒集成，制得具有优异电化学性能的无酶葡萄糖传感器。通过测试所得器件的性能，对制造方法进一步进行优化。本研究所提出的制造方法和新结构有望提升微型能量存储系统的性能，并在提升微型传感器的性能方面发挥重要作用。在项目研究过程中，以第一或通讯作者发表SCI收录论文5篇，EI收录会议论文2篇，申请发明专利9个，授权3个。依托本项目，培养硕士研究生4名，已毕业1名。