面向油质在线监测的微型平面微波传感芯片机理及关键技术研究

To satisfy the need for oil quality monitoring timely and accurately in the field of aerospace and industrial production, this project proposed a new micro planar microwave sensor based on micro fabrication and microwave principle, aiming to study a fast, accurate, real-time and reliable method for the oil water content and acidity detection. A high performance microwave sensor chip was developed, using the electric field enhancement effect and anti-noise performance of microstrip line in micro scale, and the synergistic sensitizing effect of micro-nano structure. This method is expected to replace traditional laboratory analysis method, shorten the detection time of oil quality, and implement a rapid detection. In the testing process, there is no irreversible chemical reaction on the sensitive surface. The reusability, life and stability of sensor could be improved greatly, and the real-time on-line detection would be achieved. The microsensor chip based on micro fabrication technology has the benefits of small size, lower power consumption, and simple preparation. It is also could be compatible with microelectronic technology, has a flexible application, less impact to the under test system, and could be used in small-scale confined space. The research is significant for implementing the control of fuel oil quality and the assuring the efficiency, life and safety of the engine and other industrial equipment.

为满足航空和工业生产领域及时准确监测油液质量的需求，本项目基于微加工技术及微波感应原理提出一种新型平面微波传感芯片，旨在研究针对油液中酸值及水分的快速准确且实时可靠的检测方法。借助微米级微带线电场增强效应和抗噪性能，以及微纳复合结构的协同增敏作用，获得高性能的微波传感芯片；有望替代传统的实验室分析方法，缩短油液质量检测时间，实现快速准确的检测；该方法在检测过程中敏感表面无不可逆的化学反应，不会发生损耗，因此可复用性强，有望提高传感器寿命和稳定性，真正意义上实现实时在线监测；基于微加工技术制备成微传感芯片，不仅将减小检测系统尺寸、降低功耗，而且制备方法简单，易于与微电子工艺集成，应用灵活，对被测系统影响小，可用于小尺度受限空间监测。本研究对于实现油质实时监控，保障发动机及其他工业设备的效率、寿命和安全具有重要意义。

在该项目的研究中，我们提出了一种基于柔性微带式的微波传感方法，并论证了其具有监测痕量化学成分的能力。设计并制造了具有叉指式微带结构的微波传感器，实验表明，不同构型的叉指式微波传感器都具有区分不同介电常数被测液体的能力。通过仿真和实验都证明了微带式传感器线宽减小到微纳米量级后，对微波信号具有增强的效果。以油液的水分和酸值作为检测对象，所提出的方形螺旋式微带传感器水酸同测的能力最强，且灵敏度随着线宽的减小而增加。实验进一步验证，所提出的微波传感方法可不直接与被测目标接触且适应弯曲状态，使其具有用于不同形状管道及非接触场合测量的潜力。所提出的传感方法具有体积小、柔性、轻薄、灵敏度高、检测下限低的优势，有望实现面向工业生产和食品医疗等领域各种化学成分的实时在线监测和快速检测。项目共计完成论文9篇，申请专利4项。