微纳光子器件高通量与高保真光耦合原理与技术

Micro/Nano photonic devices are the support for the development frontier of advanced optoelectronic technology and the future of optical information technology. But the study of the optical coupling principle and technology are seriously inadequate, The lack of sub-micron/nano scale photonic devices and single-mode fiber alignment coupling principle, law and technology, the lack of coupling interface [light - curing adhesive - Parts - environment] mechanisms and rules, which lead to the lack of theory guidance for the coupling and package parameters selection，and it can only rely on the practical experiences. The problems above all have become a bottleneck for the development of Micro/Nano photonic devices. The research work of this project will firmly focus on the Micro/Nano photonic device coupling package interface high optical throughput and optical signal fidelity. Aiming at the scale characteristics of coupling interface and precision requirements, it is a goal to improve the optical throughput. The research in the sub-micron/nano scale photonic devices and single- mode fiber coupling alignment of the original science, law and technology, explored high-precision alignment coupling generative mechanism and laws, meanwhile the corresponding experimental preparation and test method for coupling Interface of multi materials are proposed. According to the coupling interface of multi materials, the optical mode field fidelity as a goal, the corresponding methods of fidelity are proposed by the study for the optical signal in different medium interface distortion mechanism and laws.

微纳光子器件是光电子技术的发展前沿和未来光信息技术的支撑，具有广阔的应用前景。但针对其光学耦合原理与技术的研究严重不足，缺乏亚微米和几十纳米尺度下光子器件与单模光纤对准耦合原理、规律及其技术，缺乏耦合界面【光波-固化胶-零件-环境】作用机制与规律，导致器件耦合封装参数的选择缺乏理论指导而只能依赖经验。以上问题成为制约微纳光子器件发展的瓶颈。本项目以微纳光子器件耦合封装界面高光通量传输与光信号保真为核心展开研究：针对耦合界面尺度特性与精度要求，以提高光通量传输为目标，研究在亚微米和几十纳米尺度下光子器件与单模光纤对准耦合原理、规律及其技术，探索高精度对准耦合创成机制与规律，并提出相应的实验制备和测试方法；针对耦合界面多材料，以光模场保真为目标，研究光波在不同介质界面畸变机制与规律，提出相应的保真方法。为我国微纳光子器件的发展提供坚实的理论基础、技术和人才贮备。

本项目以微纳光子器件耦合封装界面高光通量传输与光信号保真为核心展开研究：针对耦合界面尺度特性与精度要求，以提高光通量传输为目标，①建立了光子芯片与光纤对准耦合误差源与光波传输模型，揭示了光波导芯片与阵列光纤对准误差对光传输性能的机理与规律。②提出了提出了一种基于制造容差的光波导芯片设计流程与方法和一种基于统计制造过程统计的光波导芯片制造工艺与控制方法，可实现1X2光分路器芯片的6寸晶圆批量制造，良率可达97%。③建立了光芯片与光纤耦合运动误差传递模型；提出了一种基于准直激光的五自由度误差同时测量方案，解决滚转角测量难的问题；提出了一种基于耦合模型的光子芯片与光纤快速、高精密对准搜素、耦合算法，并进行了实验验证，可实现最大插损小于5.0dB，通道非均匀性约1.0dB。④揭示了耦合界面固接材料折射率对插损、回波损耗的影响机制和规律；通过光器件在线插损监控，研究了复杂环境下光器件光学性能变化规律与失效机制。共发表学术论文16篇，其中SCI收录7，EI收录15；申请国家发明专利项6项，授权1项；出版专著2本；培养博士研究生1人，硕士研究生6人。