超材料复杂器件超声辅助精密铣磨成形理论与技术研究

Metamaterials, with some peculiar functions such as negative refraction, abnormal radiation, super resolution imaging, strong suction and stealth, plays an important role in the field of information, energy, defense and military industry application. Because of the complex shape, large span, special material and non single material, the forming process of metamaterials is very difficult and forming theory and technology is still not mature. The research object of this application is the super lens and macro / micro composite structure energy collector made of metamaterials. This research aimed at obtaining the metamaterials brittle-plastic removal model, material migration patterns and multi body interface action mechanism under the effect of the mechanical-ultrasound compound energy field. Which provides the theoretical basis for realizing the metamaterials complex surface component precision forming. By researching the deformational behavior of inhomogeneous and variable flow direction material removal, fracture mechanism, softening effect, stress and strain on processing area, surface quality prediction and rule of chip flow direction, the evolution mechanism of material surface and near-surface layer structure during the forming process can be revealed, and the scale effect of material transfer can be analyzed, and then the analytic model of material transfer theory can be established which suits for the metamaterials complex surface component material. The research of the interaction between machining tool and material interface in the condition of multi-field coupling, such as force, thermal and chemical will be conducted under the effect of the mechanical-ultrasound compound energy field. The research can also reveal the multi-field coupled physical and chemical behavior, the evolution rule of processing property, and influence rule of processing property on machining precision and surface quality. Finally, the corresponding technological parameters can be obtained by comprehensive experiments, which can improve the processing efficiency and surface quality in the same time.

超材料具有负折射、反常辐射、超分辨成像、强吸波及隐身等奇特功能，在信息、能源、国防和军工等领域应用前景广阔。超材料器件形状结构复杂、尺寸跨度大、材质特殊且非单一，其成形难度大、成形理论与技术尚需完善，本申请以超透镜和宏/微复合结构能量采集器等典型超材料复杂器件为对象，研究机械—超声复合能场作用下的超材料脆塑性去除模型、材料迁移规律和多体界面作用机理，为实现超材料复杂器件精密成形提供理论基础。研究材料去除的非均匀变流向位错滑移、断裂机制、软化效应、微观应力应变、屑流规则等，揭示成形过程中材料表层及近表层组织与形貌演变规律，分析跨尺度迁移效应，建立超材料复杂器件材料迁移理论模型；解析机械—超声复合能场中力、热和化学等多因素耦合的工具、工件和工作液界面相互作用，揭示多场多体耦合物理化学行为、加工性能演变规律及其对形貌精度和表面质量的影响规律。最终通过综合实验获得高效、精密、可控的相应工艺参数。

超材料具有负折射、反常辐射、超分辨成像、强吸波及隐身等奇特功能，在信息、能源、国防和军工等领域应用前景广阔。超材料微观组织特殊、力学性能差异大、器件构型复杂多样，采用纳米转印、激光或电子刻蚀、3D打印等成形工艺，效率低、成本高、尺寸受限、精度难以保证。本课题研究了振动辅助铣磨加工的基础理论和作用机制，设计了振动辅助加工装备构型原理、总体方案和实施办法，研制了4种不同构型方案和工作原理的振动辅助铣磨加工系统，分别为：横向超声振动铣磨装置、纵向超声振动铣磨装置、力位耦合控制的超声振动铣磨装置和基于低频振动的铣磨装置，进行了铣磨加工工艺实验。研究了不同材料、不同工艺参数条件下器件成形精度、表面粗糙度的影响规律。研制了2套高精度在位测量工具系统，分别为接触式和非接触式测量系统，开发了相应的测量软件，对测量系统的自身误差进行了分析和标定，利用自主搭建的在位测量系统对复杂曲面进行了在位测量，取得了较好的测量效果。研究了超材料复杂器件的工作机理和能量转换机制，研究了能量传递与转换的材料、物理和几何多元约束机理和耦合机制，通过理论研究、仿真分析和实验验证，研制了GHz频段、THz频段、光波段以及跨频段的多款多谱、宽谱和跨谱超材料吸收器、反射器和极化转换器。本项目共发表SCI检索论文26篇；申报专利32项，其中发明专利20项，已授权发明专利3项；获得软件著作权16项。该研究为解决超材料复杂器件的高效加工难题，提供了振动辅助铣磨与在位测量方面的新思路和新方法。