电场诱导成型可调制液态光栅制造工艺研究

Gratings as key components in optical systems are widely used in spectroscopy instruments, precision measurement, optical communication, display technology, laser tuning technology, etc. For conventional gratings, it is impossible to realize the real-time modulation of the groove profile to meet the actual needs in application and is difficult to correct the manufacturing errors. To overcome these disadvantages, a tunable grating based on electrically induced Rheomolding is proposed. The tunable grating is comprised of substrate, upper and lower modulation electrodes and polymer/liquid metal composite film. Non-uniform electric field generated by the voltage between the two electrodes can produce an inducing force to the composite film which has been heated to fluid state. The electric field force induces the polymer/liquid metal to rheoforming and finally the patterned grating is formed. The structure parameters of the liquid grating, such as pith and groove profile, can be modulated precisely by the electric field. Focusing on the modulation principle and fabrication process of the tunable grating, we aim to explore the principles and manufacturing processes of the novel precisely multi-parameter-tunable grating device through investigating the relationship between the external electric field and the rheoforming of composite film, the structure of the device, the preparation and phase transition of the composite film, and the modulation of the structure parameters of the grating.

光栅作为光学系统中的关键器件被广泛应用于光谱仪器、精密计量、光通信、显示技术、激光调谐技术等领域。针对常规光栅无法随应用的实际需求进行线纹结构参数的实时调制和难以实现制造误差修正的局限，项目提出了一种基于电场诱导成型的可调制液态光栅的结构、制造工艺及调制方法。该可调制光栅由基板，上、下调制电极和聚合物/液态金属复合薄膜层组成，其工作原理是在上、下调制电极间施加电压，产生非均匀性的周期场强，从而对加热至流体状态的复合薄膜层产生图形化的牵引力，实现聚合物/液态金属薄膜的流变成型，最终完成光栅线纹结构的图形化。通过研究外电场场强分布特性与复合薄膜流变成型的映射关系，实现液态光栅多结构参数(栅距、槽深及槽型)的精确调制。项目将围绕可调制光栅在调制原理和制造工艺方面的关键问题，拟从器件结构、复合薄膜制备及相变控制、光栅线纹结构调制等方面开展研究，探索新型多参数精确调制光栅的器件原理及制造工艺。

光栅作为光学系统中的关键器件被广泛应用于光谱仪器、精密计量、光通信、显示技术、激光调谐技术等领域。本项目针对常规光栅无法随应用的实际需求进行线纹结构参数的实时调制和难以实现制造误差修正的局限，项目提出了一种基于电场诱导成型的可调制液态光栅的结构、制造工艺及调制方法。该可调制光栅由基板，上、下调制电极和聚合物/液态金属复合薄膜层组成，其工作原理是在上、下调制电极间施加电压，产生非均匀性的周期场强，从而对加热至流体状态的复合薄膜层产生图形化的牵引力，实现聚合物/液态金属薄膜的流变成型，最终完成微米级(5-50μm 栅距)可调制液态光栅的器件制造及性能测试。通过研究外电场场强分布特性与复合薄膜流变成型的映射关系，实现了液态光栅多结构参数(栅距、槽深及槽型)的精确调制。项目围绕可调制光栅在调制原理和制造工艺方面的关键问题，从器件结构、复合薄膜制备及相变控制、光栅线纹结构调制等方面开展了研究工作，探索了新型多参数精确调制光栅的器件原理及制造工艺。