基于金刚石片上微纳集成制造NV色心固态量子磁强计机理论证及实验研究

Solid state quantum devices have great potential in the measurement of weak physical quantities and are widely concerned and research. By the mechanism research of light-solid spin interaction, an effective fluorescence signal is extracted from the diamond NV color center, which can be used to detect weak magnetic field information. In order to improve performance and practicability of Solid state quantum magnetometer, the magnetometer mechanism will be further research aimed at the fluorescent Information of NV color centers. According to the analysis of the highly integrated components in the multi-physics field, included optical magnetic and microwave field, Hamiltonian relationship, the scheme of high efficiency magnetic detection system is designed. The related module units in optical detection magnetic resonance （ODMR）system are integrated based on micro-nano fabrication technology. At the same time, key technical problems in fabrication process will be solved. In order to improve the spin decoherence time and the fluorescence collection efficiency, in this project, highly uniform NV color center arrays will be fabricated in the diamond. Meanwhile light trapping and interference cut-off filtering cavity will be introduced on the surface of diamond. And then, metal microwave antenna will be fabricated on the DBR film. Finally, the semiconductor laser is assembled on the top of diamond. After the above integration scheme, the device size will be greatly reduced.

固态量子器件在微弱物理量测量方面有着巨大的潜力，因而受到广泛关注和研究。通过研究光-固态自旋相互作用机理，提取出金刚石NV色心中有效的荧光信号，可用于检测微弱磁场信息。为一进步提高量子磁强计性能和实用性，本项目主要针对金刚石NV色心固态量子磁强计的器件小型化与集成制造进行理论和实验的深入研究。从基本的光-固态自旋机理出发分析高度集成化的量子自旋磁检测系统中光、微波和磁场等多物理场哈密顿量关系，构建高效的磁检测系统方案。对光检测磁共振（ODMR）测试系统中所涉及的相关模块单元进行基于微纳加工技术的集成化设计，并解决制造过程中的关键技术问题。围绕增加量子自旋退相干时间和荧光收集效率提出制备高度均匀NV色心阵列。同时，金刚石介质陷光与干涉截止滤波腔体方案被引入到块状金刚石上。随后，金属微波调制天线被集成加工到DBR膜上。最后，通过微组装工艺在金刚石顶端组装半导体激光。

固态量子器件在微弱物理量测量方面有着巨大的潜力，因而受到广泛关注和研究。通过研.究光-固态自旋相互作用机理，提取出金刚石NV色心中有效的荧光信号，可用于检测微弱磁场.信息。为一进步提高量子磁强计性能和实用性，本项目主要针对金刚石NV色心固态量子磁强计.的器件小型化与集成制造进行理论和实验的深入研究。从基本的光-固态自旋机理出发分析高.度集成化的量子自旋磁检测系统中光、微波和磁场等多物理场哈密顿量关系，构建高效的磁检.测系统方案。对光检测磁共振（ODMR）测试系统中所涉及的相关模块单元进行基于微纳加工技.术的集成化设计，并解决制造过程中的关键技术问题。围绕增加量子自旋退相干时间和荧光收.集效率提出制备高度均匀NV色心阵列。同时，金刚石介质陷光与干涉截止滤波腔体方案被引入.到块状金刚石上。随后，金属微波调制天线被集成加工到DBR膜上。最后根据不同应用环境制造出集成器件。