柔性功能器件大面积印刷制备研究

Today one of the main objectives of the electronic device field is to resolve the contradiction between the requirement of high performance and low economic cost.In this work, the Copper-based nano-ink with high stability in air was explored and synthesized. Then these conducted inks will be sprayed in a patterned flexible large-area substrate which fabricated by embossing and nanoimprinting with a.limited resolution of about several tens micrometer. Moreover, the relation between spraying deposition process, ink formulation and drying processing are also need to be carefully studied. Finally, an electrical uniformity higher than 95% printed devices with area of 150x150mm2 is expected. We wish this prepared method for flexible large-area electronic devices will be of help in the process.from research to manufacture.

随着社会不断进步，一方面人们要求电子产品有更高的速度、更低的能耗和更轻的重量，另一方面也要求产品生产过程中具有低成本、批量化和绿色环保等特征。本项目为解决微纳尺度结构与柔性化功能器件大面积连续快速化生产制备之间存在的矛盾，计划将纳米材料电子墨水填充到具有微纳尺度结构特征的柔性压印模板中，探索纳米材料与柔性化功能器件集成的快速制备方法。重点解决纳米铜墨水中的抗氧化问题，大面积填充均匀性以及干燥均匀性等基础问题，利用喷涂工艺探索基于纳米铜等电子材料的柔性大面积均匀一致功能化器件电极的快速制备方法，为进一步实现柔性电子器件的大规模批量化印刷制造奠定基础。

本项目在混合印刷制作的大面积微纳尺寸柔性电极的工作基础上，从纳米铜材料及纳米铜墨水合成开发、纳米铜墨水干燥固化、大面积电极均匀性及碳纳米管晶体管的全印刷制作等多方面开展了柔性器件大面积制备的研究工作，成功实现了50nm-250nm粒径可调的高稳定性纳米铜材料大批量合成；利用光烧结方法在常温下实现印刷纳米铜电阻率为13μΩ·cm；在150x150mm柔性衬底上填充导电材料均匀性大好于99%；在混合印刷柔性插齿电极基板上完成了全印刷碳纳米管反相器的试制，圆满完成项目预期目标。