面向大气环境中低浓度臭氧检测的高性能气体传感器研究

The development of high performance O3 gas sensor has important environmental significance for atmospheric monitoring. Although some progress has been made in the study of O3 sensor, but there still have some technical problems need to be solved in order to achieve real-time monitoring of ozone at room temperature. In this project, we plan to manufacture high performance O3 gas sensor which can test O3 (ppb level) with h high sensitivity, high selective, high reliability and fast response at room temperature. For this purpose, the sensing materials and device structures are designed and optimized. The main research content of this project includes three aspects as below: The sensitivity and detection limit of O3 will improved, through the intensifying strategy with hierarchical nanostructure of the oxide semiconductor and doping modification; The selectivity of the sensor will improved by constructing metal oxide heterojunction and catalyst surface odification. UV sensitization and MEMS processing technology are used to modify the device structures, in order to make gas sensor which is operational at room temperature and is stable against changes in temperature and humidity. The implementation of this project not only provides a new method for improving the performance of ozone sensors, but also provide theoretical guidance and experimental basis for the potential application of ozone gas sensor.

研制面向大气环境中O3检测的高性能气体传感器对保护生态环境和人体健康具有非常重要的意义。尽管对O3传感器的研究取得了一定的进展，但要实现室温下对O3的实时监测仍有一些技术难题需要解决。本项目从敏感材料和器件结构两方面入手，对传感器进行设计与优化，实现在室温条件下对大气环境中ppb量级O3的高灵敏度、高选择性、高稳定性的快速检测。研究内容包括：（1）通过氧化物半导体分等级结构化及掺杂改性的增感策略提高传感器的灵敏度，降低检测下限；（2）通过构筑金属氧化物异质结及催化剂表面修饰方法改善传感器的选择性；（3）通过紫外增感及MEMS加工技术对器件结构进行改进，制作抗温湿度干扰、可在室温条件下使用的气体传感器。本项目的实施不仅为改进臭氧传感器性能提供了新方法，也将为O3气体传感器的潜在应用提供理论指导和实验基础。

本项目以面向大气环境中低浓度气体检测的敏感材料制备及高性能气体传感器研究为目标。由于气敏材料的颗粒度大小及形貌将会影响材料的识别功能、转换功能和敏感体利用效率。本项目通过水热/溶剂热、静电纺丝、超声喷雾及牺牲模板等方法制备敏感材料。研究前驱物浓度、表面活性剂种类、溶液pH值、水热时间和温度对复合材料的形貌、尺寸、比表面积、负载状态等微观结构的影响，研究复合材料的生长机理并对材料进行可控制备。另外，研究敏感材料的结构单元、组装形态与光散射性、电子传输和转移特性的关系，并制作出针对于大气环境ppb量级检测的新型气体传感器。本项目的实施不仅为改进气体传感器性能提供了新方法，也将为其他高性能气体传感器构筑提供理论指导和实验基础。