多模耦合硅微谐振器中的非线性效应研究及其在振荡器中的应用

No matter sophisticated systems like the satellite navigation or consumer electronic products like mobile phones, all cannot do without the precise timing reference. Research shows that, microelectromechanical system (MEMS) technology based silicon oscillator is expected to replace the traditional quartz oscillator after overcoming the shortcomings of its performance like stability. At present, silicon oscillator is working at single vibration mode of the resonator. Based on our previous research, this project proposes to study the multi-modes coupled silicon micro resonators, exploring in-depth the new ideas and new methods to improve the frequency stability of silicon oscillator on the base of mode coupling and nonlinear effects of silicon resonators. A systematic study of mode coupled silicon resonator and oscillator will be conducted including the topology design of resonating structure, the microfabrication process, signal transduction methods and device testing, and most importantly, the analysis of nonlinear effects under mode coupling and their influence on the performance of silicon oscillators. It is to reveal the mutual influences among the topological structure, mode coupling and nonlinear effects, the three aspects of our silicon micro resonators, and to clarify the correlation between these effects and the performance of silicon oscillator. This research will provide theoretical and technical support for the development of novel silicon oscillators of high performance.

不管是卫星导航等高精尖系统，还是手机等消费电子产品，都离不开精确的时序参考。研究表明，基于微型机械电子系统(MEMS)技术的硅微振荡器在克服了其自身在稳定性等方面的不足后，有望可以代替传统的石英振荡器。目前，硅微振荡器都是工作在谐振器的单一振动模态上。在前期研究成果的基础上，本项目提出对多模耦合硅微谐振器进行研究，深入探索基于谐振器的模态耦合和非线性效应来提高硅微振荡器频率稳定性的新方法和新思路。围绕多模耦合硅微谐振器的拓扑结构设计、加工和测试，模态耦合下非线性效应与硅微振荡器性能的相关性等内容开展系统的研究。旨在揭示硅微谐振器的拓扑结构、模态耦合和非线性效应三者之间的相互影响规律及其与振荡器性能之间的相关性，为开发新型高性能硅微振荡器提供理论和技术支持。

MEMS谐振器以其优越的性能在诸如传感、时钟参考以及射频等应用领域取得了飞速的发展。在微观尺度下，谐振结构中不同振动模态的耦合现象十分普遍，这种耦合效应一方面使谐振器的动力学特性变得异常复杂，另一方面却又创造了诸多提升谐振器工作性能的可行途径。对谐振器中由于振动模态耦合产生的复杂动力学现象进行全面了解同时对其产生机理进行深入研究具有重要的理论及实际意义。基于此，本研究针对广泛存在于微观尺度谐振器中的振动模态耦合现象及其复杂动力学现象进行了系统研究，并根据研究成果研制了新型的振荡器原理样机和新型谐振式传感器。