基于超声原子力显微镜的石墨烯纳米带原位加工与电特性检测方法研究

Moore’s law, ruling chip-manufacturing industries since 1960s, is nearing its end. The research of new materials and new technology has become a hot topic over the world. Graphene, known as an excellent alternative to silicon, is an ideal chip-material. However, graphene is a zero-bandgap semiconductor in its pristine form. A bandgap can be induced by patterning graphene. Thus, graphene patterning technology has become promising research directions in the field of nano-device fabrication. This project will carry out the research on a new method of in-situ fabrication and electrical properties detection of graphene nanoribbons based on ultrasonic-vibration-assisted atomic force microscopy (UV-AFM). The major contents of the project include: modeling of the graphene lattice orientation and the intrinsic characteristic frequency, in-situ controllable fabrication of graphene nanoribbons based on UV-AFM, in-situ electrical properties detection method of graphene nanoribbons based on EFM, the construction of the experimental system and experimental verification. This investigation will provide a new theoretical method and implementation techniques for graphene-based nanodevice manufacturing, and promote the significance of the development of information technology.

统治芯片制造行业50年的摩尔定律即将走到尽头，新材料新技术的研究成为了世界各国的研究热点。石墨烯被誉为硅的绝佳替代品是下一代理想的芯片材料，然而本征石墨烯没有能隙，通过对其进行加工剪裁可在石墨烯中引入能隙，因而石墨烯加工技术成为了纳米器件制造领域的重要研究方向。本项目将开展石墨烯纳米带原位加工与电特性原位检测方法研究,提出一种基于超声原子力显微镜(UV-AFM)的石墨烯新型加工与电特性检测方法。具体研究内容包括：石墨烯晶格方向与本征特征频率建模研究；基于UV-AFM的石墨烯纳米带原位加工控制技术研究；基于静电力显微镜(EFM)的石墨烯纳米带电学特征原位检测方法研究；实验系统构建与实验验证。本研究将为基于石墨烯的纳米器件制造提供新的理论方法及实现技术，对信息技术的可持续发展具有重要的推动意义。

石墨烯因其优异的电学特性被誉为硅的绝佳替代品是下一代理想的芯片材料，然而本征石墨烯没有能隙，极大限制了它的应用，研究表明通过对其进行加工剪裁可以引入能隙，因而石墨烯加工技术的研究对推动石墨烯基纳米器件制造的发展具有重要意义。本项目开展了基于超声原子力显微镜(UV-AFM)的石墨烯新型加工与电特性检测方法。主要研究内容包括：建立了石墨烯晶向与特征频率的模型，并进行了实验验证，能够实现石墨烯晶向的快速检测；通过对AFM悬臂梁受力与悬臂梁动态硬度分析，建立了UV-AFM悬臂梁运动的理论模型；开展了基于EFM的石墨烯电特性检测机理研究，通过检测2ω频率的电场力，可初步实现石墨烯纳米带边缘结构的检测；采用自制光诱导介电泳实验系统，实现了石墨烯批量化装配。