宏动平面电机的高精度模型预测位置跟踪控制研究

Macro-drive planar motors provide cutting-edge new technology for the precision stage of lithography systems, which show their great promise for use in precision manufacturing applications, such as integrated circuits. However, high-precision position tracking control is a key scientific issue and a difficulty to be solved urgently for macro-drive planar motors. Therefore, this project proposes to research on high-precision model predictive position tracking control for macro-drive planar motors. The transfer-matrix-method-based mechanical-electromagnetic multi-field coupling model is built for the macro-drive planar motor. Based on the built model, the mechanism of the effect of the mechanical-electromagnetic multi-field coupling of the motor on the controlled electromagnetic thrust is revealed. Furthermore, the linear parameter-varying model and the compensation theory of the predicted error are researched for the motor, and then a robust position prediction model of the motor is established. Additionally, the model predictive position tracking control method of the motor is studied based on the min-max optimization control theory. A Gauss pseudospectral method-based continuous-interval iterative optimization strategy of the motor is researched. A fast optimization solution algorithm of the model predictive position tracking control is then obtained for the motor. Finally, the interrelation and rule among the designed parameters, model predictive position tracking control algorithm, and high-precision position tracking control performance are clarified theoretically and experimentally for the motor. The research of this project will create a new theory and technology of the high-precision model predictive position tracking control for macro-drive planar motors, and will provide theoretical foundation for the precision stage of the domestic high-end equipment.

宏动平面电机为光刻机精密工件台提供了前沿新技术，在集成电路等精密制造领域极具应用前景，而高精度位置跟踪控制是其亟待解决的关键科学问题和难点，为此，本项目提出研究宏动平面电机的高精度模型预测位置跟踪控制。研究基于传递矩阵法的宏动平面电机的机电磁多场耦合模型，揭示电机的机电磁多场耦合对被控量电磁推力的影响机理；研究宏动平面电机的线性时变参数模型与预测误差补偿理论，建立电机的鲁棒预测位置模型；探讨基于min-max优化控制理论的宏动平面电机模型预测位置跟踪控制方法，研究连续区间迭代优化Gauss伪谱策略，获取电机模型预测位置跟踪控制的快速优化求解算法；通过理论与实验系统地阐明宏动平面电机的设计参数、模型预测位置跟踪控制算法及其高精度位置跟踪控制性能的关联关系与规律。创立宏动平面电机高精度模型预测位置跟踪控制新理论与技术，为发展我国高端装备的精密工件台技术提供理论支撑。

宏动平面电机为光刻机精密工件台提供了前沿新技术，在集成电路等精密制造领域极具应用前景，而高精度位置跟踪控制是其亟待解决的关键科学问题和难点，为此，本项目提出研究宏动平面电机的高精度模型预测位置跟踪控制。研究了宏动平面电机的机电磁多场耦合模型，揭示了电机的机电磁多场耦合对被控量电磁推力的影响机理；研究了宏动平面电机的线性时变参数模型与预测误差补偿理论，建立了电机的鲁棒预测位置模型；探讨了基于min-max优化控制理论的宏动平面电机模型预测位置跟踪控制方法，研究了基于线性矩阵不等式和嵌套椭圆不变集的离线控制策略，获取了电机模型预测位置跟踪控制的快速优化求解算法；通过理论与实验系统地阐明了宏动平面电机的设计参数、模型预测位置跟踪控制算法及其高精度位置跟踪控制性能的关联关系与规律。输入硬约束下，研究的宏动平面电机模型预测位置跟踪控制系统在100mm行程轨迹跟踪的稳态位置误差为±16.70μm，输入硬约束和大干扰情况下，研究的宏动平面电机模型预测位置跟踪控制系统在100mm以内的行程下实现了±22.22μm的稳态位置跟踪误差，电机系统实现了微米级跟踪的大行程高精度运动。最终创立了宏动平面电机高精度模型预测位置跟踪控制新理论与技术，为发展我国高端装备的精密工件台技术提供了理论支撑。