硅基集成化光学导向半加器的研究

The further shrink of feature size of the chip in integrated circuits has been limited by the basic physical principles such as quantum tunneling et al,which results in various difficulties for the integrated circuits to continue growing with the Moore's law. The improvement of the electronic information processing capability is approaching bottleneck.However,mass data and high speed information processing technology is demanded in many fields related to national security, national economy and people’s livelihood，therefore,it is urgent to develop novel information processing technology.Optical directed logic is a novel information processing scheme which utilizes the strengths of both photonics and electronics while avoiding their weaknesses ,and it utilizes the high speed and parallel performance of optics to achieve high speed information processing.. The purpose of this application is to develop an optical directed logic device which can achieve the half-adder operation based on microring resonator(MRR).Silicon-based micro-nano waveguide is used to fabricate MRR.Inversed tapers are integrated on the input and output terminals of the waveguide to reduce the mode mismatch between the waveguide and fiber,and enhance the coupling efficiency.The thermo-optic effect is employed to modulate MRR in order to achieve the concept proof of the device fastly.The fabrication process of the silicon-based integrated optical directed half-adder proposed in this application is compatible with modern CMOS fabrication process,resulting in obvious merits such as small volume,low power-consumption and good scalability,and they can also be readily to be integrated with electrical components to form a silicon monolithic integrated multi-functional information processing system..

集成电路中芯片特征尺寸的进一步缩小受到量子隧穿效应等基本物理原理的限制从而导致了集成电路很难按照摩尔定律继续发展下去，电子信息处理能力的提升空间遇到了瓶颈。但是，在涉及国家安全与国计民生等领域都迫切需要海量、高速的信息处理技术，因此发展新型的信息处理技术迫在眉睫。光学导向逻辑是一种新型的信息处理方案，它合理利用光子和电子的优势而避免了它们的劣势，利用光的高速和并行处理等特性实现了高速的信息处理。. 本申请拟采用微环谐振器实现半加运算的光学导向逻辑器件。硅基微纳波导用来制作微环谐振器。波导输入/输出端采用倒锥型结构来减小波导与光纤的模场失配，从而提高耦合效率。为了尽快实现器件的原理验证，硅的热光效应用于微环谐振器的调制。本申请拟研究的硅基集成光学导向半加器制造工艺与现有CMOS工艺兼容，器件体积小、功耗低、易扩展，便于和电学元件集成，有望实现硅基单片集成的多功能信息处理系统。

当今在涉及国家安全与国计民生等领域都迫切需要海量、高速的信息处理技术，因此发展新型的信息处理技术迫在眉睫。光学导向逻辑是一种新型的信息处理方案，它合理利用光子和电子的优势而避免了它们的劣势，利用光的高速和并行处理等特性实现了高速的信息处理。本项目采用微环谐振器实现半加运算的光学导向逻辑器件。硅基微纳波导用来制作微环谐振器。波导输入/输出端采用倒锥型结构来减小波导与光纤的模场失配，从而提高耦合效率。通过对波导区的光学特性和掺杂区的电学特性的分析，确定P-I-N二极管的本征区宽度取值范围，实现较低光损耗的同时达到了高质量的调制效果。本项目研究的硅基集成光学导向半加器制造工艺与现有CMOS工艺兼容，器件体积小、功耗低、易扩展，便于和电学元件集成，有望实现硅基单片集成的多功能信息处理系统。在本项目的支持下，项目组成员目前在国际著名期刊上已发表或录用论文15篇，已授权专利2项，已申请专利3项，参加学术交流活动4次。