超宽量程CMOS MEMS气压传感器基础研究

Weather monitoring significantly benefits the economy of the society. With the development of IOT (Internet of things), the barometric sensor becomes one of the bottle necks of weather monitoring equipments. Radiosonde is one of the most important equipments in weather measuring application so that high-performance sensors are necessary. As to the barometric sensor, the measurement range and the ability of working in the harsh environment should be improved. By means of MEMS technology, we propose a CMOS compatible barometric sensor structure which can work in a ultra large measurement range at low temperature. The main innovations of this structure include: (1) ultra large measurement range (50-1080hPa),(2) low temperature working ability (-90℃) (3) the suitable design of packaging. The main content of our research is the design method and theory of the radiosonde barometric sensor, including: (1) the design of the structure, (2) the design of the fabrication process, (3) the design of the packaging and (4) the design of the measurement tests. During the research work, samples of the barometric sensor will be fabricated. It should promote the development of the radiosonde barometric sensors in the future.

气象监测具有重要的社会意义和经济意义，随着物联网产业的发展以及在气象监测领域的应用，气压传感器成为气象行业发展的重要瓶颈之一。在所有的气象探测活动中，空基观测极为重要，相应的测试仪器（探空仪）对高性能气压传感器提出了特殊要求，传感器必须满足恶劣环境下宽量程测量等要求。采用MEMS 技术，本项目首次提出可与CMOS标准工艺兼容的宽量程压阻型气压传感器结构方案，其主要创新点包括：（1）超宽测量量程(50-1080hPa)；（2）超低温工作(-90℃)；（3）适用于低温环境的封装设计。本项目的核心研究内容是建立一套完整的探空气压传感器设计方法：包括：（1）传感器敏感薄膜与结构设计；（2）传感器工艺设计；（3）传感器封装设计；（4）传感器测试设计。通过研究，研制出原理样机，为探空气压传感器设计和未来应用奠定基础。

气象监测具有重要的社会意义和经济意义，在气象探测活动中，空基观测极为重要，尤其对探空仪中的关键部件高性能气压传感器具有迫切需求。随着微机电系统(MEMS)技术的快速发展，MEMS高性能气压传感器已成为近年该领域的主要研究方向之一。本项目基于MEMS技术，研究并实现了一套完整的探空气压传感器设计方法：包括传感器结构设计、传感器工艺设计、传感器封装设计、传感器温度补偿与测试研究。通过本项目的顺利实施，研制出的原理样机在常用压力测量区间20KPa-110KPa内的灵敏度为0.031mv/kPav，非线性度为0.17%，重复性系数为1.05%，迟滞系数为0.097%，误差小于1hPa。研究结果表明，本项目研制的探空气压传感器芯片，符合预期目标，为进一步实现具有自主知识产权的高性能气压传感器在探空领域中的工程应用奠定基础。