利用变参量位相元件实现干涉光场的多参量动态调控

Interference lithography is widely used for large-area fabrication, but it only fabricates structures with constant parameters, which is not suitable for fabricating a variety of nanostructures. The dynamic parameters’ regulation of the nanostructure is a major challenge in the field of nanofabrication. This project proposes an optical method to dynamically modulate the interference light field, making it possible for the online fabrication of the nano-structured functional materials. By inserting a variable-parameters phase device consisting of discrete sub-phase elements in the optical Fourier transform system, the joint modulation mechanism for the interference field is analyzed with discrete sub-phase elements in different combinations, and influences on the nanostructure’s parameters are dicussed in detail with discrete sub-phase elements in different position distribution. By decompositing sub-components of the complex nano-structured light field, the sub-phase elements as well as their composition methods are inversely derivated, which enables controlling of nano-structures’ parameters at real time, puts forward the online fabrication of the various nanostructures. Furthermore, the dynamic parameters’ controlling of the nanostructure makes it possible to replace the traditional imposition method by an optical way, which reduces the fabrication process for the large-area of various nanostructures.

目前，干涉光刻虽可制备大面积纳米结构，但加工结构单一，无法满足变参量纳米结构加工需求。纳米结构多参量实时调控，仍是纳米加工领域面临的重大难题。本项目拟通过光学方法实现纳米干涉光场的多参量动态调控，为纳米结构功能材料的在线制备提供基础。通过在傅立叶变换光路中设置由不同子位相元件组成的变参量位相元件，研究傅立叶变换光路中分立的子位相元件以不同的方式组合对干涉光场复合调控的机理，重点研究子位相元件间相对位置变化对干涉光场结构参数的影响规律。在此基础上，分析形成变参量纳米结构的子光场及其组合方式，反演实现子位相元件的设计和组合，从而实现干涉光场的多参量实时调控，为变参量纳米结构的在线制备提供基础；同时，为采用光学拼版的方法取代传统拼版工艺，简化大幅面变参量纳米结构的制备工艺提供基础。

本项目针对干涉光刻制备结构单一的缺点，提出了实现微纳干涉光场动态调控的光学系统。完善和发展了位相调制的傅立叶变换光学系统中入射光场与出射光场之间的演化规律，揭示了位相元件调制的傅立叶变换光学系统的等效工作原理，总结了位相元件相对运动对出射光场参量的调控规律，并分析了其对出射光场有效干涉面积的影响因素；采用了位相元件组分段调控入射光，分析了子位相元件不同的组合形式对干涉光场的复合调控原理，阐明了子位相元件相对位置变化对干涉光场及其分布区域的影响。在此基础上，针对变参量超表面器件，提出了位相元件的反演设计方法，实现了干涉光场多参量的实时调控。实验上，将位相调制的傅立叶变换光学系统与激光扩束准直、双远心光路及微缩物镜相结合，搭建了干涉光刻系统，利用反演设计制备的位相元件，探索了该干涉光刻系统在像素化超表面吸收器件、像素化超表面彩色显示、像素化超表面透镜等大幅面像素化超表面功能器件方面的应用，为大幅面变参量微纳结构的在线制备提供了理论工艺基础。