超精密混合磁浮支承多维零刚度生成机理与调控方法

Magnetic bearing is an important developing direction of motion bearings in ultra-precision manufacturing equipment. As the magnitude of ultra-precision manufacturing accuracy is directed to nano/micronano scale, especially for IC manufacturing, magnetic bearing is faced with the challenge of broadband, micro-amplitude/ultra-micro-amplitude vibration isolation. Zero stiffness hybrid magnetic bearing is a new form of ultra-precision bearing expected to solve this problem. But the multi-dimensional zero stiffness formation mechanism and regulation methods of it are still in an urgent need to be ascertained. So, this projection is about the fundamental issues of nonlinear coupling dynamic behavior mechanism and active control methods of multi-dimensional zero stiffness hybrid magnetic bearing under multi-source disturbances. The projection investigates into nonlinear coupling dynamics modeling and analysis of multi-dimensional zero stiffness hybrid magnetic bearing under multi-source disturbances, system structure design and optimization, vibration isolation-positioning composite control, testbench construction and validation, to reveal the constituent relationships of electromagnet-mechanical structure, to explore the law of system dynamic behavior, to develop system innovation structure and its decoupling and compensation control strategy based on electromagnetic actuator and piezoelectric sensor. This research aims to provide for the development of ultra-precision manufacturing equipment new theories, new methods and new techniques of high performance bearing.

磁浮支承是超精密制造装备运动支承技术发展的重要方向。随着以IC制造为代表的超精密制造精度向纳米、亚纳米量级迈进，超精密制造装备的运动支承面临着宽频域、微幅/超微幅振动隔离带来的严峻挑战。多维零刚度混合磁浮支承是可望应对这一挑战的超精密支承新形式，然而亟需探明其复杂支承特性形成机理与调控方法。为此，本项目围绕“多源扰动下的多维零刚度混合磁浮支承非线性耦合动力学行为及其调控规律”这一关键科学问题展开深入研究，主要包括：多源扰动下的多维零刚度磁浮支承非线性耦合动力学建模与分析、系统结构设计及优化、隔振-定位复合控制、实验平台搭建与验证等，进而揭示其多物理量/场耦合系统复杂动力学特性，探明多源扰动下系统动力学行为规律，提出基于电磁作动、压电传感的系统创新结构及其解耦与补偿控制策略。为超精密制造装备的发展提供高性能磁浮支承设计的新理论与新方法。

超精密制造装备的运动支承面临着宽频域、微幅/超微幅振动隔离带来的严峻挑战，多维零刚度混合磁浮支承是可望应对这一挑战的超精密支承新形式。本项目提出了磁浮支承精确高效的磁场建模方法，发现了永磁悬浮支承的磁阻效应，探明了刚度-位移曲线平移偏转机理，提出了磁阻效应抑制方法；发明了新型二维Halbach永磁阵列、二自由度零刚度磁浮作动器、三自由度平面作动器；综合考虑传感器低频噪声和动态特性对前馈控制器及反馈控制器的影响，得出了超低频控制器设计的约束条件；提出了基于分数阶滤波器的隔振-定位协控制策略，解决了整数阶滤波器导致的系统失稳问题；针对含延时的非线性系统，提出了未知扰动下前馈参数及延时时间的无偏辨识及规划补偿策略；搭建实验平台对项目所提出的理论、方法进行了有效验证。本项目累计发表SCI收录论文10篇、中文核心期刊论文1篇，获授权发明专利3项，获得国家技术发明二等奖1项，培养毕业博士生3人、硕士研究生4人。