卷曲型量子阱微谐振腔的光学性质和探测性能研究

As a kind of important infrared detection devices, quantum well infrared devices have great potentials in sensing long-wavelength optical wave in tera-hertz range and in the field of multi-color detection. The current project proposes is to combine the quantum well infrared detector with rolled-up vertical optical resonator via strain engineering. The optical resonance in the tubular resonator will be carefully investigated to disclose how the resonator concentrates the energy of infrared wave. The project will be carried out both theoretically and experimentally and the sensitivity of the detection device will be enhanced on the basis of strengthened interaction between the quantum well and light wave. This is planned to be realize by designing suitable materials for quantum well, patterning nanomembranes, as well as tuning the tubular structures, and the mechanism regarding the intensified interaction will also be elucidated. In addition, the structures of quantum wells and resonator will be further optimized in both materials and process aspects to improve the infrared resonance in the resonators, which will ultimately enhance the sensitivity and quantum efficiency of the detector. The exploration in mechanism and fabrication process in this project may greatly improve the performance of the infrared detection device especially in quantum efficiency enhancement, which will be contributive to development of more practical applications using such combined infrared detection devices.

量子阱红外探测器作为一种重要的红外探测器件在长波、太赫兹以及多色探测方面都有很重要的应用价值。本项目将在应力工程研究的基础上，通过在量子阱红外探测器中引入卷曲型微谐振腔结构，深入研究管状谐振腔中的光学谐振过程，研究利用谐振腔集中红外光波能量以求实现高灵敏度探测的原理和方法。项目研究工作中将以理论建模和实验验证方式实现量子阱材料设计、量子阱薄膜图形化处理、卷曲结构调控等，并在机理研究上揭示该特殊结构中相互作用增强的原理。在此基础上，通过材料和工艺的优化调节量子阱及相应卷曲谐振腔的结构，进一步增强谐振腔中的红外光谐振，以达到提高量子阱红外探测器件量子效率的目的。本项目在机理研究和原型器件制备上的探索将有力推进在红外探测领域实现谐振腔共振增强模式下的红外探测。同时，这也将在很大程度上解决目前量子阱红外探测器量子效率偏低这一重要的瓶颈问题。

量子阱红外探测器作为红外探测技术发展的一个重要方向，在长波、太赫兹及多色探测方面有巨大的应用前景。卷曲型微谐振腔基于卷曲纳米技术发展而来。本项目将管状微腔与量子阱红外探测器相结合，利用应变工程将量子阱薄膜卷成螺旋管状结构，从而制备出一种新型管状量子阱红外探测器。在项目执行中，着重进行新结构器件的材料设计、外延生长、工艺流程研究，并实现器件的最终制备。同时，从理论模拟和实验角度出发，探究新型管状器件的性能表现、结构特征和优势。这将为改善传统量子阱红外探测器性能提供新的思路。