OLED薄膜封装中高致密有机薄膜电喷制造与性能调控

Inorganic/organic laminated thin films barriers have become the mainstream encapsulation technology of flexible OLED, where, for good performance of encapsulation, the component organic thin films with high compact, uniform and low roughness surface are highly required. The emerging electrohydrodynamic atomization (EHDA) technology is firstly introduced to deposit the organic layer of thin film encapsulation. The mechanism of breakup droplet in the conditions of steady cone-jet is investigated by theoretical modeling to understand the working mechanism of EHDA. The effects of main process factors on volume and distribution of the droplet in plume are also investigated. Additionally, through collaborative optimization of the technological parameter of EHDA, surface energy and temperature of substrate, droplet spreading, coalescence and UV curing can be guided to form a uniform and compact organic film. In the end, the process window of EHDA deposition system is established for realizing proposed “on-demand” methods. These investigation conclusions on EHDA deposition technology will provide a critical theoretical basis and technical support for high compact organic thin films manufacturing and thin films encapsulation of flexible OLED.

针对柔性OLED无机/有机叠层薄膜封装对有机薄膜提出的致密、均匀和低粗糙度表面的制造挑战，探索基于电流体雾化工艺制备有机薄膜的制造新方法。研究高压电场下稳定锥射流形成机制和分裂雾滴发生机理，揭示各工艺参数对稳定锥射流雾化角度、雾滴体积大小和分布均匀性的影响规律，协同优化微射流雾化参数、基板及环境参数控制微纳雾滴在基板上的流动铺展、融合及固化，建立高性能有机薄膜的电流体雾化沉积工艺控制系统，实现有机墨液可控喷射，为OLED薄膜封装中高致密有机薄膜的高可靠性制造提供理论基础和技术支撑。

OLED在照明和柔性显示领域具有广泛的应用前景。商业化OLED关键技术挑战之一是高可靠性隔水氧封装叠层薄膜制造，微米厚的有机薄膜成膜质量、表面形貌和厚度均匀性更加关键，极大影响着纳米无机薄膜成膜质量和整体叠层封装的性能。本项目针对OLED器件叠层封装薄膜中的有机溶剂的电喷制造薄膜需求，开展理论、模拟和实验研究，重点研究稳定锥射流发生机制、喷射液滴体积的工艺调控、成膜机理控制、多层异质薄膜性能测试与优化，为TFE有机层薄膜的大规模电喷沉积提供关键的理论与技术支撑。研究成果包括发明专利4项，开发功能薄膜电喷制造新设备并实现企业应用。