大量程轮辐式压电六维力传感器基础理论与实验研究

This project is to solve the main bottleneck problems of complex structure, difficult decoupling, large volume, small range, and low dynamic response, when existing six-axis force sensors are used to measure transient force, multi-axis force, and large range dynamic force in real time under overload situations. Based on fault tolerant concept, a novel lightweight and strong decoupling elastomer’s spoke structure type and eight force-sensing elements spatial layout measurement mechanism of the large range parallel piezoelectric six-axis force sensor with spoke structure is proposed and researched. The mapping relationships between the six dimensional force and branch force sensitive element stress will be established according to parallel load sharing principle. The internal stress distribution principles and force-power conversion rules will be explored the internal quartz wafer under six dimensional forces. Based on the principle of virtual work and the principle of deformation coordination, static and dynamic models of the sensor are established and analyzed. Sensitivity and natural frequency analytic expressions of the sensor are deduced. Key technologies of sensor preparation technology are needed to be breakthrough. Large range piezoelectric six-axis force sensor prototype will be fabricated. The static and dynamic calibration methods and nonlinear decoupling algorithm of the piezoelectric six-axis force sensor with spoke structure are researched. The error sources of six-axis force sensor are analyzed and researched. Static and dynamic test uncertainties of sensor are analyzed and researched. In additional, it has important the theoretical and practical meaning for design, development, and application of six-axis force sensor in aerospace, load equipment, and other application fields.

针对重载场合下现有六维力传感器实时测量瞬变、多维、大量程动态作用力需求存在的结构复杂、解耦困难、体积大、量程小、动态响应不足等瓶颈，基于容错理念，创新性提出一种轻量化大量程强解耦压电式六维力传感器新的轮辐式支撑结构形式和力敏元件新的八点空间布局测量机理，基于并联分载原理，建立测力分支力敏元件受力与所受六维外力之间的映射关系，探究六维力作用下石英晶片内部应力分布规律和力电转换规律，基于虚功原理和变形协调一致原则，建立传感器静、动力学解析模型，推导出传感器的灵敏度和固有频率等解析表达式，对其建模仿真分析，突破晶组制备工艺关键技术，研制大量程轮辐式压电六维力传感器样机，搭建静动态测试平台完成传感器静动态标定实验，研究传感器整机标定方法和非线性融合解耦算法，分析和研究传感器静动态测试性能不确定度。本项目对航空航天、重载操作装备等领域大量程六维力传感器设计、应用、开发研究具有重要的理论与实践意义。

针对重载场合下现有六维力传感器实时测量瞬变、多维、重载动态作用力需求存在的结构复杂、解耦困难、体积大、量程小、动态响应不足等瓶颈，基于容错理念，创新性提出一种轻量化大量程强解耦压电式六维力传感器新的轮辐式支撑结构形式和力敏元件新的八点空间布局测量机理，在六维力/力矩测量的过程中，不同布局石英晶组分别进行力和力矩的测量，不同输出结果之间不会产生干扰，可屏蔽传感器的向间耦合。通过有限元分析研究了石英晶片切型和力电耦合规律；为了验证本项目所提六维力传感器测量原理和结构设计可行性，通过有限元软件对传感器进行了静动力学性能仿真分析。为了提高传感器可靠性，对传感器容错测量机理进行了理论和实验研究，当其中一个测量位点发生故障，其余三个无故障位点可以继续工作，通过重构六维力测量模型，完成测量任务。为了能有效预测传感器力学性能指标，基于机理建模方法，建立了传感器静力学和动力学模型，建立了各零件结构参数对灵敏度和固有频率的影响规律。为了实现传感器轻量化设计，基于遗传算法和有限元相结合方法，完成了传感器结构优化设计，获得了多因素影响下传感器较优的参数组合方法，并完成传感器样机研制。基于虚拟仪器技术和MATLAB技术，完成了六维力传感器动态测试系统的开发，可实现不同点数布局压电式六（多）维力传感器和其他测量原理六（多）维力传感器数据采集、显示、记录和处理。搭建了六维力传感器静态和动态标定实验平台，完成了传感器静力学标定和动力学标定实验。为了提高传感器测量精度，分别研究了基于BP神经网络、RBF神经网络、最小二乘支持向量机、GABP等非线性解耦算法，实现了六维力传感器有效解耦。为了提高传感器测量精度，研究了石英晶片清洗、干燥工艺和石英晶组制备工艺，通过正交试验方法，研究了干燥温度、清洗方法和干燥时间对石英晶片绝缘阻抗影响规律。分析了传感器误差来源并提出了避免措施，基于GUM法研究了传感器不确定度评价方法，建立了六维力传感器不确定度评价模型。