非球面微柱面透镜阵列模具的微磨料水射流辅助高效超精密磨削技术研究

The optical glass aspherical cylindrical microlens arrays (ACMA) is a kind of key optical element serving in the 3D display system and laser beam shaping system in the fields of national defense and civilian applications. By considering the characteristics and advantages of ultra-precision grinding and micro abrasive waterjet, a new micro abrasive waterjet assisted high-efficiency ultra-precision grinding technology and system are proposed for the ultra-precision machining of the molds for this kind of optical glass elements. The coupling effect of grinding and micro abrasive waterjet machining will be applied to improve the surface/subsurface quality and its stability of the molds. To improve its ultra-precision grinding efficiency dramatically, the micro-structured grinding wheel dressed with the micro abrasive waterjet will be used to grinding the molds by adapting the rough-precision integrated progressive grinding process and the quasi-real-time compensation method based on the time-varying contour of the grinding wheel. Theoretically, a model for micro-structured grinding wheel profile and wheel surface topography will be established for machining the profile precisely. The quasi-static and dynamic nano-mechanical response behaviors of mold materials with excellent high-temperature mechanical properties, such as silicon carbide and tungsten carbide, will be researched and their material removal mechanisms in the coupling zone of micro abrasive waterjet and grinding will be revealed. The surface roughness and surface form accuracy prediction model will be established. These theoretical topics will be researched for controlling the form accuracy and surface quality of the mold. A typical ACMA mold will be ground efficiently by adapting the novel methods and process proposed in this project to meet the low-cost, flexible and mass-manufacturing needs of optical glass ACMA elements. The results of this project will provide important theories and technologies for the rapid development of precision glass molding technology.

光学玻璃非球面微柱面透镜阵列是国防和民用3D显示系统及激光光束整形系统中的关键光学元件。针对其模压模具在超精密磨削时面型精度和表面质量不易控制、加工效率低的难题，本研究提出一种新的微磨料水射流辅助高效超精密磨削技术与系统。利用磨削和微磨料水射流加工的耦合作用，提高模具面形精度和表面质量的稳定性；利用微磨料射流修整的微细结构化砂轮，采用递进磨削工艺和基于砂轮时变轮廓的准实时补偿方法，大幅提高其超精密磨削效率。建立微细结构化砂轮轮廓与表面形貌预测模型，针对高温力学性能优异的碳化硅和碳化钨等硬脆模具材料，研究其准静态和动态纳米力学响应行为，揭示微磨料水射流与磨削耦合作用区的工件材料去除机理，建立表面粗糙度和面形精度预测模型，实现工件面形精度和表面质量的主动控制，完成典型非球面微柱面透镜阵列模压模具的高效超精密磨削。研究结果对推动精密玻璃模压技术的快速发展具有重要的理论意义和实际应用价值。

光学玻璃非球面微柱面透镜阵列（ACMA）是3D显示系统及激光光束整形系统中的关键光学元件。为解决其模压模具超精密磨削的面型精度和表面质量不易控制、效率低等难题，系统地开展了ACMA模具的微磨料水射流辅助高效超精密磨削技术研究。.理论上揭示了碳化硅和碳化钨两种复相硬脆模具材料的纳米尺度材料去除机理与表面创成机理、 金刚石砂轮微细阵列结构的磨料水射流精密成形与修锐机理、以及微细阵列结构砂轮磨削ACMA模具的表面复映机理，建立了陶瓷模具材料表面粗糙度预测模型。基于重构的金刚石砂轮表面形貌，获得的表面粗糙度模型预测误差仅为5.87 %。建立了同时考虑了磨粒分布特征、硬脆模具材料去除机理、磨损机理的磨削力理论模型。以上理论研究结果为硬脆材料模具精密磨削的表面质量和轮廓精度控制奠定了基础，具有重要的意义。.技术方面提出并验证了金刚石砂轮表面微细结构阵列的磨料水射流法向精密修整法和微磨料水射流辅助磨削技术，建立了砂轮射流修整的余弦分布去除函数，采用Tikhonov正则化算法求解射流修整驻留时间，应用边缘平滑延拓算法减小了算法中的边缘效应，实现了砂轮表面微细结构的精密修整，轮廓误差小于0.6 %。提出了粗精集成递进磨削法，结合仿形磨削和轮廓磨削的优势，将正弦型ACMA结构精密磨削效率提高5倍率以上。针对ACMA的超精密磨削工序要求，建立了超薄砂轮高次曲线截面轮廓的螺旋插补修整模型以及误差预测模型，实现了超薄砂轮的精密轮廓修整（轮廓误差PV 5.6μm），为超精密提供了工具保障。提出了基于时变砂轮截面轮廓的模具面形误差的准实时补偿方法，从理论上解决砂轮修整和砂轮磨损造成的面形误差，采用该方法和工艺磨削硬质合金 ACMA 模具，阵列轮廓误差经过两次补偿磨削便快速收敛至1.22μm。 .研究成果发表高水平学术论文28篇，其中SCI/EI国际期刊论文20篇，授权发明专利10项，研究培养博士研究生3名，硕士研究生4名，参加学术会议16人次，项目负责人获批山东省泰山产业领军人才。项目研究成果对推动精密玻璃模压技术的快速发展具有重要的理论意义和实际应用价值。