空间运动调制飞刀伺服多尺度金刚石切削微纳结构功能表面基础理论及应用研究

In this project, we propose a novel spatial motion modulation based fly-cutting servo diamond machining method for flexible and efficient throughput generation of multi-tier hierarchical micro/nanostructures with high accuracy and high throughput. With this new diamond machining method, the rotation of the diamond tool with constant rotational distance and the translational servo motion of the workpiece are combined to generate the primary surface with low spatial frequency, and the multi-axial spatial motion is used to modulate the basic servo motion of the workpiece to generate the high-order nanostructures with high spatial frequency. Combining theoretical analysis and experimental tests, this project will focus on introducing the new surface generation mechanism underlying this new diamond cutting method. We shall also focus on the construction of the configuration of the physical machining system, and especially on the key component of this system, namely the mechatronic system for the high-order spatial motion modulation. Besides, this project will also focus on the development of the computer aided manufacturing system and its experimental demonstration for this new machining method. The research in this project will significantly extend the current micro/nanomanufacturing systems and enhance the micro/nanomachining capability, accordingly popularizing potential applications of the multi-tier hierarchical micro/nanostructures in a wide variety of related fields， including the phototics, hydrodynamics and biomedicine . Simultaneously, this project will enrich understandings of the researchers on the cutting kinematics, surface generation mechanism and systematic cutting behavior of the single point diamond turning, providing theoretical foundations and technical supports to further developments of diamond cutting.

本项目提出一种基于空间调制飞刀伺服多尺度金刚石切削新方法，以用于具有多层次及多尺度复杂微纳结构功能表面的高效、柔性、精密、大规模创成。其学术思想为：采用定轴旋转刀具飞切与工件往复伺服运动切削加工低空间频率微尺度结构，同时空间多轴高频振动混合调制工件伺服运动以加工具有高空间频率特征纳尺度结构。本项目致力于空间运动调制飞刀伺服多尺度金刚石切削新原理解析，构建该切削系统物理构型及其高维度空间运动调制机电伺服核心系统，同时研究该多尺度切削新方法计算机辅助制造系统及其实验验证。本项目的研究将解决现行金刚石切削系统的诸多固有缺陷与不足，突破其微纳制造能力的局限性，丰富微纳结构功能表面在光子学、流体动力学及生物医学等领域的进一步应用。同时，本项目的研究也将深化人们对现行的多种金刚石超精密切削方法的切削运动学、表面创成机理及系统性切削行为的理解与认知，为该类技术的进一步发展提供必要的理论支撑与技术基础。

微纳结构功能表面在光学、生物、摩擦学、界面科学等领域取得了广泛应用，但现行的无论是特种加工亦或是机械加工都无法实现高效率、高柔性、高精度、大规模制微纳结构功能表面。为此本项目在发现了基于空间运动调制飞刀伺服多尺度金刚石切削新方法上，深入研究了微纳结构功能表面创成原理和特征；深入研究了高维度空间运动调制机电伺服系统，设计了压电驱动空间三自由全解耦柔性机构，根据多目标智能优化算法确定了其结构参数，建立了该柔性机构的非线性动力学模型；测试了其工作性能；深入研究了伺服控制策略，发现了前反馈补偿控制最优参数；深入研究了表面创成机制，发现了金刚石刀具最优切削路径，建立了微纳结构功能表面预估模型，加工了不同微纳结构功能表面。本项目对复杂微纳结构功能表面创成的系统研究，为现行多种金刚石超精密切削系统提供必要的理论支撑与技术基础，扩展了超精密飞刀切削在工业中的应用范围。项目资助发表论文21篇，SCI收录21篇；出站博士后2人，培养博士生已毕业3人和在读2人。