基于MOEMS的柔性微型LED集成阵列器件理论及技术研究

The integrated flexible micro-LED array (μLEDs) devices are of urgent needs in the field of medical, health, display, sensing, industrial and the internet of things. According to international research progress and our research foundation in μLEDs, a new kind of flexible μLEDs fabricated by MOEMS technique was first proposed.The common AlGaInP-based epitaxial wafers will be used as raw materials of flexible μLEDs. The flexible μLEDs devices with LED as light-emitting unit have exhibited many advantages, such as high luminous efficiency, high brightness, good stability and long life. And it is easy to be obtained, very popular and low cost because the common LED epitaxial wafers is used as the raw materials. Additionally,the series of micro optical electro mechanical systems (MOEMS) technology will be used to fabricate the devices, which is of the characteristics of high precision machining, process flexibility, consistency, and is suitable for mass production.Compared to the troditional rigid LED, these flexible μLEDs devices have shown broad prospects for application in health monitoring, diagnosis and imaging. We plan to solve the key problems in the study by simulation, device design and testing, such as the the mechanical, temperature, and thermal characteristics of the materials, and the fabrication methods of the μLED array, the flexible materials and the electrode, etc. We will provide the integrated AlGaInP-μLEDs device samples with 16 × 16 pixels at the end of the project. The structure of this flexible integration μLEDs devices and its fabrication methods based on MOEMS technology that we proposed have not been reported in china and abroad. The project team has applied for national invention patents. The realated techniques are of independent intellectual property.

针对医疗、健康、显示、传感、工业及物联网等领域对集成化的柔性微型LED阵列（μLEDs）器件的迫切需求和国际上的研究现状，本项目首次提出一种以通用的AlGaInP基外延片为基片材料，采用MOEMS技术制作的柔性集成μLEDs器件。该器件以LED为发光单元，发光效率高、亮度高、稳定性好且寿命长；采用通用的LED外延片为原料，取材方便、易普及，成本低；全部采用MOEMS技术制作，加工精度高、工艺灵活、一致性好，且适于大批量生产。该器件在健康检测、诊断、成像等方面的应用前景是传统硬质LED所无法比拟的。拟通过模拟仿真、器件设计制作及检测研究，解决μLED阵列、柔性材料和电极制备及集成技术中的关键科学问题，提供16×16柔性集成AlGaInP-μLEDs器件样品。本项目所提出的柔性集成μLEDs器件结构及基于MOEMS技术的器件制作方法国内外未见报道，项目组已申请国家发明专利，具有自主知识产权。

针对医疗、健康、显示、智能工业及物联网等领域对集成化的柔性微型LED阵列器件的迫切需求和国际上的研究现状，本项目提出了一种以通用AlGaInP LED外延片为基片材料，基于MOEMS制作技术的柔性集成微型LED阵列器件。通过理论和实验研究，解决了材料选择、结构与工艺设计以及器件制作中的科学和技术问题。首先，建立了微型LED集成阵列芯片模型，通过有限元仿真等方法研究了器件的光电特性及热学特性，得出电流分布、发光均匀性以及芯片温度分布与器件结构的关系。根据理论分析结果，设计了柔性阵列器件结构，并针对器件可弯曲的特点，在柔性材料特性研究基础上设计了二维及三维电极结构。在制作技术方面，提出了柔性集成微型LED阵列器件的MOEMS制作工艺流程，进行了柔性材料特性研究、微型发光单元原位分割技术研究、基片减薄技术、柔性电极制作技术及集成技术研究，完成了柔性基底微型LED阵列器件的制作及测试。.本项目基于MOEMS技术的柔性微型LED集成阵列器件研究的特点在于，该器件以无机LED为发光单元，发光效率高、亮度高、稳定性好 且寿命长；采用通用的LED外延片为原料，取材方便、成本低；采用MOEMS技术制作，加工精度高、工艺灵活、一致性好，且适于批量生产。柔性微型 LED 集成阵列器件作为一种结合了微加工技术与LED制作工艺特点的新型微型柔性LED器件，有望将LED的应用推向更宽广、更新颖的领域。.本项目完成了项目计划书的研究内容，实现了预期的研究结果。在项目执行期间，所研究的器件结构及制作技术授权国家发明专利14项，发表学术论文15篇（SCI检索5篇），培养博士、硕士研究生8名，进行相关国际学术交流9次。