微纳结构铌酸锂波导高速电光调制器

Micro and nanostructured media such as photonic crystals is an artificial microstructure to realize photon manipulation. The effective electro-optic coefficient of micro and nanostructured modulator in silicon or III-V semiconductors is relatively low, they do not possess a strong nonlinear properties, hence, it is difficult to achieve a low-voltage driven and miniature modulator. This project merges the nano-slot waveguide and photonic crystal, combines the slow light and lithium niobate with a large second-order nonlinear coefficient to enhance electro-optic effect, reduce the driving voltage of high-speed electro-optic modulator, achieve the miniaturization and to improve the modulation efficiency. The researches include: theoretically establish the combination mechanism of the slow light and the lithium niobate material; research on the electro-optical tunability and the miniaturization of devices based on photonic crystals and reduce the driving voltage. Establish a systematic and theoretical design method that will be used for fabricating the micro and nanostructured electro-optic modulator on nonlinear material; By means of the recent micro and nanofabrication technologies to realize the nano slot waveguide, the photonic crystals structure and the matched electrodes for high speed electro-optic modulation. The electro-optic effect can be significantly enhanced as the light transmit to this structure. Furthermore, the scale of the modulator can be largely miniatured, the driving energy will be reduced. Thus, the compact and high speed electro-optic modulator can be successfully realized. The project has a extensive value of scientific research for realizing integrated electro-optic modulator on lithium niobate and attractive application in high speed optical information interconnection.

介质微纳结构如光子晶体是人工微观结构实现光子调控。在硅基或三五族半导体的微纳结构调制器的有效电光系数较低，不具有很强的非线性属性，难以实现低电压驱动和微型化。本项目融合纳米缝隙波导和光子晶体的慢光效应在器件微型化上的应用，结合铌酸锂较大的二阶非线性系数，实现电光效应的增强，降低铌酸锂微纳结构高速电光调制器的驱动电压，实现极小微型化，提高调制效率。研究内容包括：理论上建立纳米缝隙波导和光子晶体的慢光与铌酸锂相互作用的机理；研究铌酸锂薄膜微纳结构对实现器件微型化和低驱动电压的电光调谐机制，建立一套在铌酸锂单晶薄膜上制作微纳结构电光调制器的设计方法。结合铌酸锂的微纳加工技术制备纳米缝隙波导、光子晶体结构和匹配电极实现高速的电光调制。光在铌酸锂微纳结构中将极大增强电光效应, 缩小调制器的尺寸并降低其能耗，实现调制器的微型化，实现便于集成的微型化高速铌酸锂电光调制器，应用于高速的信息光互联。

本项目融合铌酸锂波导和微纳结构的慢光效应在器件微型化上的应用，结合铌酸锂较大的二阶非线性系数，实现电光效应的增强，降低铌酸锂微纳结构高速电光调制器的驱动电压，实现极小微型化。研究内容包括：理论上建立微纳纳波导和微纳结构的慢光与铌酸锂相互作用的机理；研究铌酸锂波导微纳结构对实现器件微型化和低驱动电压的电光调谐机制，建立一套在铌酸锂单晶波导上制作微纳结构电光调制器的设计方法。结合铌酸锂的微纳加工技术制备波导、微纳结构和匹配电极实现高速的电光调制。光在铌酸锂微纳结构中将极大增强电光效应, 缩小调制器的尺寸并降低其能耗，实现调制器的微型化，实现便于集成的微型化高速铌酸锂电光调制器，应用于高速的信息光互联。. 实现铌酸锂波导微纳结构的理论和仿真模型及分析，实验上测试了微结构电极铌酸锂波导模式的偏转及其调制，适用调制频率接近10GHz；高Q值的光纤微环与铌酸锂波导的耦合及其幅度调制(0.13dB/V)；基于铌酸锂的等离子激元共振结构实现了低电压调控（<2V）的幅度调制；制备了基于铌酸锂的纳米间距（75nm）的叉指电极的制备为实现毫伏特（mV）驱动电压的电光调制器提供较好的支撑平台。于此同时，项目过程设计的晶体微纳加工工艺和技术也为相关的领域器件制备提供很好的参考。. 基于此项工作的研究将为电光调控微纳器件提供良好的基础平台，同时在电光高速调制、低驱动电压、高灵敏度电场探测等微纳器件等得到应用。