多自由度齿轮快速测量新原理的研究

In order to realize the fast gear measurement in production field, and solve the problems of the Gimbal multidimensional measuring structure, including the slow measurement speed and complex structure and so on. A new principle of multi-freedom fast gear measurement is proposed in this project, with the principle of double-flank gear rolling measurement as the research object, to improve the measurement efficiency and simplify the measurement structure. The basic idea stems from the gas static bearing and electronic plug gauge, combining the characteristics of gas static bearing and electronic plug gauge, the arrangement of 3 inductance micrometer in the upper and the lower section of the cylinder core shaft are set respectively, to measure the axis position variety of standard gear when the gear pair is at double flank rolling state, the fast measurement of radial composite deviations, lead slope deviation and taper deviation are realized by measuring the real time axis motion of standard gear. This project is focused on research on the new principle of fast gear measurement, in order to realize development of fast measurement technology of lead slope deviation and taper deviation, and experimental research. The project is expected to realize measurement of the radial composite deviations of gear, the lead slope deviation and taper deviation, solve the problem of fast measurement of gear production field, establish relevant theory of multi-freedom fast gear measurement. The research results of this project will provide theoretical and technical support for the fast gear measurement in production field, and has wide application prospect.

为实现齿轮生产现场的快速测量，解决Gimbal多维测量结构测量速度慢，测量结构复杂等问题，本项目以齿轮双面啮合原理为研究对象，以提高测量效率，简化测量结构为目标，提出了新型多自由度齿轮快速测量原理。其基本思想源于气浮静压轴承与电子塞规，结合气浮静压轴承与电子塞规的特点，在圆柱芯轴的上下截面内，分别布置3个电感式位移传感器来测量标准测量齿轮与被测齿轮作双面啮合滚动时的轴线位置变动，通过测量标准齿轮实时运动轴线，实现径向综合偏差、齿向倾斜偏差与锥度偏差的快速测量。本项目致力于齿轮现场快速测量新原理的研究，开发齿轮齿向倾斜偏差与锥度偏差的快速测量技术，并开展实验研究。项目预期实现齿轮径向综合偏差、齿向倾斜偏差与锥度偏差的测量，解决齿轮生产现场快速测量难题，建立多自由度齿轮快速测量相关理论。项目研究成果为齿轮现场快速测量提供理论与技术支撑，具有广阔的应用前景。

课题深入研究了基于双面啮合的多自由度齿轮误差快速测量新原理，其主要成果包括：研究了基于双面啮合原理的内置式多自由度齿轮误差测量系统，通过内孔上下截面等角度设置的微位移传感器获得齿轮双面啮合过程中齿轮锥度误差与齿向倾斜误差，并定义了测量一致性的齿轮锥度误差与齿向倾斜误差。本项目为解决微型位移传感器难题，研究了基于光臂放大式高精度微位移传感器。通过结合光学三角放大法与位置敏感探测器，完全避免了光栅式传感器存在的光学刻线密度难以进一步提升的技术瓶颈问题，创新性的设计了三角波反射镜与多测头交替测量技术方案。创新性的发现了直角波反射镜的特殊光学放大原理，提出高倍数放大基本原理，并针对2倍放大结构进行了实验研究，稳定测量精度达0.8um,验证了多倍位移放大的正确性，多倍放大结构的精度理论上优于0.1um。创新性的设计了高精度跟踪式位移传感器，通过三角跟踪原理实现超高精度的位移测量。本项目的系列研究不仅解决了当前高精度位移测量传感器价格昂贵、体积较大且精度难以进一步提高的技术瓶颈，而且在实现高精度测量的同时极大降低了传感器的成本。为了实现气浮系统的精确控制，课题组尝试建立了气浮控制系统的非线性数学模型，研究了基于滑模变结构控制和基于T-S模糊控制的非线性控制方法在典型非线性系统中应用。课题组提出了基于双面啮合原理的端面式齿轮多自由度齿轮误差测量系统，并开发了实验样机。采用蒙特卡罗法对多自由度齿轮误差测量系统与端面式齿轮多自由度齿轮误差测量系统的测量精度进行了实验，实验结果验证了测量系统的原理与测量精度。研究了齿轮径向综合误差提取算法，提出了改进滑动误差提取算法，实验结果表明算法效率提升接近100倍。