面向大范围动态扫描的纳米平台动力学机理与控制方法研究

Many emerging nano-applications, such as scanning probe microscope and ultramicroscopic imaging systems, are heavily relying on the large-range and high-precision scanning of nano manipulators, which poses significant challenges on nano servo theory, different from existing nano-positioning technologies. To meet the particular servo challenges on the analysis, modeling and control of large deformation compliant mechanisms based nano stages supporting high performance scanning/tracking, this research will investigate the dynamical modeling approach from the perspectives of large deformation compliant mechanisms and rigid-flexible coupling, and extend the internal model based tracking control theory to better capture the dynamical characteristics of the tracking reference signals. Meanwhile, an adaptive observer based robust control architecture will be further explored to better handle the rate/frequency dependent hysteresis nonlinearity and various external disturbances, such that the system robustness and transient performance can be improved. The primary goal of this research is to develop a comprehensive analysis, modeling and tracking control methodology specifically for nano-tracking applications. Meanwhile a novel nano manipulating platform with leading technologies will be established such that the above theory and methods can be deployed for experimental verification purposes. This work will contribute to the core technologies supporting ultra high precision instruments and manufacturing equipments.

以扫描探针显微镜和超显微成像为代表的诸多新兴应用越来越依赖纳米平台的大范围高精度动态扫描技术，并对纳米伺服理论提出了与现有纳米定位技术不同的新挑战。本课题针对纳米平台在轨迹跟踪（扫描）模式下对大挠度形变分析和系统建模及高动态精度轨迹跟踪控制等突出存在的伺服挑战，通过对大跨度柔顺机构变形机理研究和刚柔耦合分析建立更有效的动力学模型，并充分利用被跟踪信号的动力学特性（如周期频率特性）拓展基于新型内模结构的输出调节控制理论，进而研究迟滞非线性的自适应补偿及基于干扰观测器的鲁棒控制结构，综合提升系统的动态跟踪性能，形成一套面向大行程快速扫描应用的纳米平台建模和控制方法。同时将搭建具有国际领先性能的纳米移定位平台，将上述方法应用于实际纳米伺服系统中，为高端科学仪器与超精密制造装备的核心伺服技术奠定基础。

纳米级高性能运动系统是集成电路装备，微纳制造、及纳米科学仪器等国家战略科技领域的纳米尺度的共性核心部件，具有巨大的研究价值和产业意义。以扫描探针显微镜和超显微成像等应用为代表的诸多新兴应用越来越依赖纳米平台的大范围高精度动态扫描技术，并对纳米伺服理论提出了与现有纳米定位技术不同的新挑战。本课题针对纳米运动系统在大范围扫描模式下对高动态精密轨迹跟踪和运动行程提出的相矛盾的苛刻性能要求，深入研究了大跨度柔性机构变形机理和基于刚柔耦合分析的纳米平台机电耦合动力学建模方法。在此基础上，拓展了基于新型内模结构的输出调节控制理论，提出了面向柔顺机构应力刚化非线性和微执行器迟滞非线性补偿的离散时间自适应控制方法，带扰动观测的时滞纳米平台改进型鲁棒重复控制方法和基于新型内模结构的鲁棒抗饱和跟踪控制方法，使闭环纳米伺服系统在增大行程的情况下，在有限刚度范围内实现高速高精度跟踪的优化设计。在上述理论研究的基础上，搭建了ANSYS-MATLAB联合数值仿真平台，实现了机械有限元仿真和控制算法数值仿真的综合一体化优化。进而研制了一套伺服控制性能经中国计量科学研究院等权威机构认证的、国际领先的纳米移位移样机系统，为高端精密仪器与制造装备的研制提供了重要的核心伺服技术基础。