基于均匀微滴直写的可调石墨烯THz微结构构筑及机制

Terahertz (THz) technology has broad application prospects in wireless communications, spectral imaging, nondestructive examination and other fields. This project proposed a new idea to combine the uniform droplet spraying 3D printing technology with the graphene THz technology in view of the existing problems such as the complicated process and poor adjustability of nowadays THz devices. By using the electro-optically tunable nature of graphene in the THz band and the rapid flexible technological properties of uniform droplet spraying method, we intend to prepare tunable graphene THz micro-structure by uniform droplet spraying technology. We intend to study the design, properties and rheological properties of graphene-based solution, so as to obtain graphene-based inks suitable for droplet printing. We are going to study the surface plasmon resonant frequency and influence factors of stacked graphene sheets micro-structure to reveal the effects of graphene sheet morphology, film thickness and doping concentration on the resonant frequency. In addition, it is necessary to study the relationship between the micro-structure and the surface plasmon resonant frequency, and to clarify the resonant frequency regulation mechanism based on the graphene micro-structure and characteristic size. In this way, we will break through the droplet-based direct writing technology to prepare graphene THz micro-structure, and achieve the goal of precise construction and effective regulation of the graphene micro-structure. It is expected to solve the bottlenecks of complicated process and poor customizability of nowadays THz absorbers and modulators, which might open up new ways for their development and application.

太赫兹（THz）技术在无线通信、光谱成像、无损检测等领域有着巨大的应用前景。本项目针对目前THz器件制备工艺复杂、可调性差等现存问题，提出将均匀微滴喷射3D打印技术与石墨烯THz技术相结合的新思路，利用石墨烯在THz频段的电光可调性质和均匀微滴喷射技术的快速、柔性化制备特性，采用均匀微滴喷射直写技术构筑调石墨烯THz微结构。拟研究石墨烯基溶液设计、溶液性质及流变特性，获得适于微滴喷射打印的石墨烯基墨水；研究片层堆叠石墨烯微结构等离激元共振频率及影响因素，揭示石墨烯片层形态、薄膜厚度、掺杂浓度对共振频率的影响规律；研究石墨烯微结构与等离激元共振频率的构效关系，揭示石墨烯微结构构型与特征尺寸的共振频率调控机制。从而突破微滴直写石墨烯THz微结构技术，达到微滴直写石墨烯微结构精准构建与有效调控的目标。有望解决THz吸收器与调制器制备工艺复杂、难以柔性化定制的瓶颈问题，为其发展应用开辟新途径。

针对石墨烯太赫兹微结构器件制备工艺复杂、需借助掩模、难以定制化快速成型的国际性难题，提出采用均匀微滴喷射打印方法制备石墨烯太赫兹微结构的新方法，系统研究了用于石墨烯太赫兹微结构微滴打印成型的水基石墨烯墨水（材料）、均匀石墨烯微滴喷射沉积试验系统（设备）及其沉积形貌调控方法（工艺）和太赫兹微结构表征测试技术。研发了均匀石墨烯微滴喷射沉积试验系统，通过探索氮掺杂石墨烯片层材料制备方法及其墨水分散性、理化特性影响因素，研制出稳定分散、适宜均匀微滴喷射的水基氮掺杂石墨烯墨水；在此基础上，通过探究各工艺参数和微域动态过程对石墨烯单点、直线沉积形貌的影响规律，实现了石墨烯微滴沉积形貌的宏/微尺度调控，开发出面向高分辨率柔性微结构的PDMS基底石墨烯微滴嵌入式打印技术，揭示了刚性和柔性基底上石墨烯微结构的可控沉积机理；结合不同构型石墨烯微结构的太赫兹性能仿真分析和打印研究，探究了微结构构型、结构尺寸、石墨烯厚度与太赫兹等离激元共振频率的关系，制备并测试了石墨烯太赫兹微结构样件，为推动石墨烯太赫兹功能器件的无掩模快速制备奠定了理论和试验基础。