一体化自供能NO2气体传感器敏感机理及特性研究

This project proposes a fundamentally new sensitive mechanism in self-powered gas sensing, aiming at providing a new idea for the self-powered sensing technology. The integration of energy harvesting and detection in a sensor unit is realized by the combination of the triboelectric nanogenerator and resistance gas sensor. Through finite element simulation and first principle calculation, the mechanism of electricity generation as well as energy conversion was studied. In addition, by the combination of thin film characterization and electric measurement, the influences of surface modification of contacting materials and structural parameter of nanogenerator as well as the processing technology on the output power were investigated to further optimize the device structure and improve its energy conversion efficiency. Moreover, on the basis of new two dimensional materials and hybrid functional nanomaterials as sensitive materials, the effects of surface morphology, interfaces and diffusion on the gas sensing characters were explored. To convert the mechanical energy of air flow into electricity by triboelectric nanogenerator, the prepared sensor is able to actively detect target gas without the need of batteries and period maintenance, which effectively addresses the problems of semiconductor gas sensors in wireless sensor networks, such as limited battery life and application range, and ensures its long-term stable operation.

本项目提出一种新型的自主检测外界气体敏感机理，旨在为自供能检测技术提供新的研究思想。通过摩擦纳米发电机与气体传感器的集成实现了传感器供能-探测一体化。利用有限元数值模拟和第一性原理计算，研究纳米尺寸下摩擦纳米发电机发电原理与能量转化机制。同时，通过薄膜表征和电学测试相结合的方法，研究起电薄膜表面纳米化处理、发电机结构尺寸及加工工艺对发电机输出功率的影响，并优化器件结构和提高其能量转化效率。此外，该项目选择新型二维纳米材料和复合功能纳米材料作为气敏材料，探索其表面形貌、界面、扩散等对气体探测性能的影响。利用摩擦纳米发电机收集气流动能并转化成电能，所制备的传感器能够主动感知外界气体信号，无需配置电池或定期维护，从而有效地解决了无线传感器网络中半导体气体传感器电池寿命有限、应用范围窄等问题，确保了无线传感网络长期稳定运行。

本项目属传感技术及系统领域。通过摩擦纳米发电机与气体传感器的集成实现了传感器供能-探测一体化。利用有限元数值模拟和第一性原理计算，研究纳米尺寸下摩擦纳米发电机发电原理与能量转化机制。同时，通过薄膜表征和电学测试相结合的方法，研究起电薄膜表面纳米化处理、发电机结构尺寸及加工工艺对发电机输出功率的影响，并优化器件结构和提高其能量转化效率。测试了器件自供能性能和气敏性能，研究了它们对NO2、NH3、水汽等气体的敏感性能，在薄膜表征的基础上对其相关机理进行了分析。同时，项目还研究了一体化自供能气体传感器变送电路设计与集成工艺。项目相关成果申请国家发明专利23项（授权10项），发表高水平学术论文15篇（全部标注自然科学基金资助，其中SCI论文13篇，会议论文2篇），并获2018年国防技术发明三等奖1项。