基于单极性永磁转子的两自由度直线旋转电机研究

Two-degree-of-freedom (2-DOF) linear and rotary drive devices are widely used in the robotics and semiconductor manufacturing field, which can easily be made by connecting one or two single DOF motors and the gears or links. However, the system accuracy, dynamic performance and reliability are seriously affected by the complicated mechanical structure. This project is devoted to study a 2-DOF linear rotary machine (LRM) based on a unipolar permanent magnet rotor, break through the key theories and methods of topology design and torque / thrust optimization, and realize linear, rotary and helical motion, meanwhile, increase torque / thrust density and reduce torque / thrust fluctuation. This project emphasizes on studying the principle of electromechanical energy conversion, constructing the basic electromagnetic relationship and clarifying its operating mechanism. Study its distribution criteria of torque and thrust, and propose a topological structure of permanent magnet LRM that is suitable for the requirement of high dynamic response, high torque/ thrust density, high precision and so on. Study on the accurate calculation method of electromagnetic parameter calculation for the LRM in different motion modes and different load conditions, and the optimization methods and guidelines of the structure design, electromagnetic parameter calculation and torque/thrust ripple will be established. The research of the project provides new ideas to the design and optimization for the LRM, the achievement will provide theoretical and technical supports for the application of the machine in the field of 2-DOF drive.

广泛应用于机器人和半导体制造领域的两自由度直线旋转驱动装置通常由单个或两个单自由度电机及相应的传动/支撑机构组合而成，驱动装置的复杂性严重影响了系统的精度、动态性能和可靠性。本项目拟研究一种单极性永磁转子两自由度直线旋转电机，突破其拓扑结构设计、转矩/推力优化等关键理论和方法，实现独立的直线、旋转以及二者复合的螺旋运动，并提高转矩/推力密度，降低转矩/推力波动。拟重点研究该种电机的机电能量转换原理，构建其基本电磁关系，阐明其运行机制；研究该种电机转矩和推力的分配准则，提出适合于高动态响应、大转矩/推力密度、高精度等要求的永磁直线旋转电机拓扑结构；探讨不同运动形式与不同负载条件下该种电机的电磁性能准确计算方法，建立该种电机结构设计、电磁参数计算、转矩/推力波动优化的方法和准则。本项目的研究将为直线旋转电机的设计及优化提供新的思路，为该电机在二自由度驱动领域的应用奠定理论和技术基础。

广泛应用于机器人和半导体制造领域的两自由度直线旋转驱动装置通常由单个或两个单自 由度电机及相应的传动/支撑机构组合而成，驱动装置的复杂性严重影响了系统的精度、动态 性能和可靠性。本项目巧妙地将单极性旋转永磁电机与高动态响应的音圈电机相融合，提出一种基于单极性（交替极）永磁的2-DoF-LRM，旨在实现结构简单和控制方便的同时，提高电机精度和转矩/推力密度，满足机器人和半导体制造等领域的要求。借鉴单极性永磁电机和音圈电机运行机理分析电机的基本运行原理及进行单极性永磁电机和单极性音圈电机设计，得出永磁体减少50%情况下单极性转子永磁电机较传统永磁电机输出转矩仅降低15%，输出推力降低50%，但气隙的增大单极性永磁电机性能下降更快；在此基础上，提出了动磁同心式、动磁解耦同心式、动磁轴向双定子组合式、动圈轴向组合式及动圈同心式2-DoF-LRM等拓扑结构类型。采用磁场解析法、场路结合法及有限元等方法对LRM进行电磁设计，找到电机功率等级、转矩和推力等性能与结构参数的变化规律，建立了该电机的转矩和推力的分配准则；直接通过三维有限元分析方法分析了动圈轴线组合2-DoF-LRM和同心式2-DoF-LRM直线部分与旋转部分耦合关系，分析表明无论是轴向组合式还是同心式2-DoF-LRM，直线部分与与旋转部分相互影响均可忽略不计；研制了样机并构建测试平台以验证理论的正确性；在2-Dof-LRM的基础上，亦研究了多自由度的感应球形电机并先后研制了机械支撑的球形电机和磁悬浮的球形电机，并进行了相关的测试；本项目的研究为多自由度电机设计及优化提供新的思路，亦为该种电机在半导体加工等精密设备的推广应用提供理论与技术支持。