介电/压电异质叠层薄膜移相材料的制备与性能研究

The dielectric film with only single function can not meet with the need of the micromation, multi-function and integration of microwave tunable devices. The materials with outstanding phase shift, dielectric loss and temperature stability can be realized by combining dielectric and piezoelectric thin films. In this project, the research interests are focused on the relationship between of the interface strain, coupling effect and dielectric tunable properties of dielectric/piezoelectric thin films. With the variation of interface structure characters, such as lattice mismatch and bonding, it will be studied the effects of interface strain and coupling effect on the dielectric response. Through the design of drive electrode and interdigital coplanar waveguide transmission line, it will be studied the dielectric response of multilayer thin films. The relationship between of paraelectric and piezoelectric with the various conditions of temperature and electric field will be also investigated. After then, the relationship between of interface strain, coupling effects and dielectric properties will be obtained. This study focuses on the design of electrode structure, interface structure and coupling effect between films with the purpose of promoting dielectric tunable properties multi-function and high quality theoretically and technically.

随着微波可调器件微型化、功能化、集成化发展，单一功能的介质薄膜已无法满足这一趋势要求。将微波性能优良的介电薄膜与压电性能优良的压电薄膜复合，既可达到移相的目的，又可降低介电损耗，提高材料的温度稳定性。本项目将重点探讨介电/压电异质叠层薄膜的界面应变及耦合效应与介电可调性能之间的关系。通过控制界面晶格畸变、电子成键等界面结构，探讨异质界面应变及耦合效应对介电响应的影响及其影响规律；通过驱动电极和叉指式共面波导传输线的设计，研究压电及异质叠层薄膜在外场作用下的介电响应，探讨温度、电场等作用下异质叠层薄膜的压电相与顺电相之间的相互影响，获得界面应变及耦合效应与介电性能相关性规律。该项目探讨了电极结构的设计和不同性质薄膜的界面结构及耦合效应，为实现微波可调器件高品质化及功能化提供理论依据与技术支撑。

随着微波可调器件微型化、功能化、集成化发展，单一功能的介质薄膜已无法满足这一趋势要求。将微波性能优良的介电薄膜与压电性能优良的压电薄膜复合，既可达到移相的目的，又可降低介电损耗，提高材料的温度稳定性。. 本项目重点研究了介电/压电异质叠层薄膜的界面应变及耦合效应与介电可调性能之间的关系。采用sol-gel法制备PZT压电薄膜，探讨了驱动电压等参数对压电薄膜应变的影响及其影响规律；采用水溶液凝胶法制备Ba(Mg1/3B2/3)O3介电薄膜，获得了Ba(Mg1/3B2/3)O3/PZT薄膜最佳制备工艺。采用第一性原理，分析了电子结构对介电/压电异质叠层薄膜性能的影响。通过驱动电极和叉指式共面波导传输线的设计，研究了异质叠层薄膜在外场作用下的介电响应，探讨了温度、电场等作用下异质叠层薄膜的压电相与顺电相之间的相互影响，获得界面应变及耦合效应与介电性能相关性规律。. 依托本项目，在国内外有学术影响力的刊物上发表7篇学术论文，国家一流课程（工程材料表征技术，第一参与）1门，指导本科生参与国家级大学生创新创业计划项目5人。培养本科生8人，副教授2人。本项目研究为实现微波可调器件高品质化及功能化提供理论依据与技术支撑。