数字散斑干涉滚转角误差测量理论及方法研究

Geometric errors of linear guide have a great influence on the manufacturing accuracy of precision machine tool. Precision measurement of roll angle error, one of the most key geometric errors, is of great significance. However, the existed measurement methods have many problems that need to be solved, such as the use of cooperation target, the difficulty of measuring in the whole travel range and the low precision. This project proposes a novel roll angle measurement theory and method using digital speckle pattern interferometry. In the project, the digital speckle fringe formation mechanism caused by roll is explored, and the roll angle error measurement theory using the digital speckle interference is developed. To realize the high precision measurement of roll angle, the optical setup and phase detection algorithm are studied, and the interference mechanism with multiple degrees of freedom error is expounded. This proposed method has no target and can realize high accuracy measurement in large travel range. The research of this project can provide new theoretical basis and technical support to control and compensate the roll angle error, and is helpful to improve the mechanical manufacturing level in China.

直线导轨的几何运动误差严重影响精密机床的加工精度，滚转角误差是其中一项关键运动误差，对它的精密测量具有重要的意义。目前的测量方法存在需要靶镜配合、全行程下测量难度大、实测精度不高等问题，亟需新的测量手段。本项目提出一种新的基于数字散斑干涉技术的滚转角误差测量理论及方法，拟探索滚转运动所导致的数字散斑干涉条纹形成机制，发展散斑干涉滚转角误差测量理论，研究其光路与算法实现形式，阐述多自由度误差下的串扰机理，最终实现滚转角误差的高精度测量。该方法具有无需靶镜配合、能够在大行程下实现高精度测量的优点，可为滚转角误差控制和补偿提供新的理论依据和技术支撑，研究成果有助于提高我国机械加工制造水平。

直线导轨的几何运动误差严重影响精密机床的加工精度，滚转角误差是其中一项关键运动误差，对它的精密测量具有重要的意义。本项目提出了一种基于数字散斑干涉技术的滚转角误差测量理论及方法，具有无需靶镜配合、高分辨率、非接触全场测量的优点，实测分辨率高达±0.05''；设计了一种偏振时间相移方法，避免压电陶瓷不稳定影响相移精度；提出一种基于平稳小波变换和正余弦变换的散斑干涉条纹滤波方法，实现快速预处理为相位准确提取做好准备；同时通过测量偏摆和俯仰角消除对滚转角的串扰。在上述研究基础之上，本项目构建实验测量系统开展了丰富的实验研究。通过本项目的研究为滚转角误差控制和补偿提供新的理论依据和技术支撑，该成果有望应用于提高我国机械加工制造水平。