激光单重高阶回馈效应及其振动测量原理研究

Vibration is a physical phenomenon that exists widely in nature, which is useful or harmful. It is necessary to measure and analyze the vibration characteristics when we want to use or restrain vibration. Especially, the higher demand to vibration measurement is proposed along with the development of nano-machining and modern manufacturing. This proposal presents a new principle of vibration measurement based on single high-order laser feedback effect. It utilizes the high resolution optical fringe produced by single high-order laser feedback to realize high accuracy measurement. The concrete research content as follows: Study the single high-order feedback effect, such as the intensity modulation, phase characteristics, and frequency response, based on the folding feedback cavity. Analyze the generation mechanism of high resolution optical fringe by building single high-order feedback model. Design the interface circuit and frequency spectral analysis method to realize the high accuracy measurement of vibration. This system not only has high measuring accuracy but also can be traceable to laser wavelength, which has the potential to calibrate other vibration measurement sensors.

振动是自然界广泛存在的物理现象，它既有利也有害，为了合理利用或抑制振动，需要对不同条件下的振动特性进行评价和测量。特别是随着精密加工与现代制造业的不断发展，对振动的精密测量提出了更高要求。本项目提出一种基于单重高阶回馈效应的振动测量新原理，利用激光单重高阶回馈效应，在没有任何电子细分条件下产生具有纳米级光学分辨率的回馈条纹，利用该光学回馈条纹实现对微小振动的高精度振幅测量。具体内容包括：设计特殊结构的平面折叠回馈腔，基于平面折叠腔研究激光单重高阶回馈效应的强度特性、位相特性及频率特性等；建立单重高阶回馈模型，分析高分辨率光学回馈条纹的产生机制；设计接口电路及频谱分析方法，搭建一套高精度的振动测量系统。采用该原理的振动测量系统不但具有纳米级的振幅测量精度，而且还可以溯源到激光波长，具有标定其他振动测量系统的潜力。

振动的高精度测量是工业生产和科学研究的基础。本课题针对目前国际上现有研究的不足和缺口，提出一种基于单重高阶回馈效应的振动测量新原理，利用激光单重高阶回馈效应，获得了具有纳米级光学分辨率的回馈条纹，利用该光学回馈条纹实现了对微小振动的高精度振幅测量。通过设计特殊结构的平面折叠回馈腔，研究了激光单重高阶回馈效应的强度特性、位相特性及频率特性；建立了单重高阶回馈模型，阐明了高分辨率光学回馈条纹的产生机制；设计制作了接口电路及基于Labview的频谱分析方法，实现了一套高精度的振动测量系统。采用该原理的振动测量系统不但具有纳米级的振幅测量精度，而且还可以溯源到激光波长，可以用于标定其他振动测量系统。